JPS52117575A - Electronic gun for electronic beam exposure unit - Google Patents

Electronic gun for electronic beam exposure unit

Info

Publication number
JPS52117575A
JPS52117575A JP3418376A JP3418376A JPS52117575A JP S52117575 A JPS52117575 A JP S52117575A JP 3418376 A JP3418376 A JP 3418376A JP 3418376 A JP3418376 A JP 3418376A JP S52117575 A JPS52117575 A JP S52117575A
Authority
JP
Japan
Prior art keywords
electronic
exposure unit
beam exposure
gun
electronic beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3418376A
Other languages
Japanese (ja)
Inventor
Mamoru Nakasuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3418376A priority Critical patent/JPS52117575A/en
Publication of JPS52117575A publication Critical patent/JPS52117575A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To achieve exposure with no proximity effect received by forming electronic beam featuring intensity profile.
COPYRIGHT: (C)1977,JPO&Japio
JP3418376A 1976-03-30 1976-03-30 Electronic gun for electronic beam exposure unit Pending JPS52117575A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3418376A JPS52117575A (en) 1976-03-30 1976-03-30 Electronic gun for electronic beam exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3418376A JPS52117575A (en) 1976-03-30 1976-03-30 Electronic gun for electronic beam exposure unit

Publications (1)

Publication Number Publication Date
JPS52117575A true JPS52117575A (en) 1977-10-03

Family

ID=12407073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3418376A Pending JPS52117575A (en) 1976-03-30 1976-03-30 Electronic gun for electronic beam exposure unit

Country Status (1)

Country Link
JP (1) JPS52117575A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55131946A (en) * 1979-03-31 1980-10-14 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron gun

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55131946A (en) * 1979-03-31 1980-10-14 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron gun

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