JPS5240075A - Wafer prober - Google Patents

Wafer prober

Info

Publication number
JPS5240075A
JPS5240075A JP11611175A JP11611175A JPS5240075A JP S5240075 A JPS5240075 A JP S5240075A JP 11611175 A JP11611175 A JP 11611175A JP 11611175 A JP11611175 A JP 11611175A JP S5240075 A JPS5240075 A JP S5240075A
Authority
JP
Japan
Prior art keywords
wafer prober
continous
probing
wafers
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11611175A
Other languages
Japanese (ja)
Inventor
Katsuhiko Kita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP11611175A priority Critical patent/JPS5240075A/en
Publication of JPS5240075A publication Critical patent/JPS5240075A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: Probing is made possible irrespective of the sizes of electronic elements, whereby continous inspection of a multiple kinds of wafers can be made automatically.
COPYRIGHT: (C)1977,JPO&Japio
JP11611175A 1975-09-26 1975-09-26 Wafer prober Pending JPS5240075A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11611175A JPS5240075A (en) 1975-09-26 1975-09-26 Wafer prober

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11611175A JPS5240075A (en) 1975-09-26 1975-09-26 Wafer prober

Publications (1)

Publication Number Publication Date
JPS5240075A true JPS5240075A (en) 1977-03-28

Family

ID=14678954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11611175A Pending JPS5240075A (en) 1975-09-26 1975-09-26 Wafer prober

Country Status (1)

Country Link
JP (1) JPS5240075A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866339A (en) * 1981-10-16 1983-04-20 Toshiba Corp Data accumulation method of integrated circuit device
JPS6387739A (en) * 1986-09-30 1988-04-19 Tokyo Electron Ltd Error correction method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866339A (en) * 1981-10-16 1983-04-20 Toshiba Corp Data accumulation method of integrated circuit device
JPS6387739A (en) * 1986-09-30 1988-04-19 Tokyo Electron Ltd Error correction method

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