JPS5240979A - Apparatus for testing characteristics of semiconductor device - Google Patents

Apparatus for testing characteristics of semiconductor device

Info

Publication number
JPS5240979A
JPS5240979A JP11661475A JP11661475A JPS5240979A JP S5240979 A JPS5240979 A JP S5240979A JP 11661475 A JP11661475 A JP 11661475A JP 11661475 A JP11661475 A JP 11661475A JP S5240979 A JPS5240979 A JP S5240979A
Authority
JP
Japan
Prior art keywords
semiconductor device
testing characteristics
testing
stop
connect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11661475A
Other languages
Japanese (ja)
Other versions
JPS608625B2 (en
Inventor
Tatsutoshi Sensui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP50116614A priority Critical patent/JPS608625B2/en
Publication of JPS5240979A publication Critical patent/JPS5240979A/en
Publication of JPS608625B2 publication Critical patent/JPS608625B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To connect a device such as an automatic wafer prober to detect abnormality in field in characteristics testing of semiconductor device and to stop the test automatically.
COPYRIGHT: (C)1977,JPO&Japio
JP50116614A 1975-09-26 1975-09-26 Characteristic testing equipment for semiconductor devices Expired JPS608625B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50116614A JPS608625B2 (en) 1975-09-26 1975-09-26 Characteristic testing equipment for semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50116614A JPS608625B2 (en) 1975-09-26 1975-09-26 Characteristic testing equipment for semiconductor devices

Publications (2)

Publication Number Publication Date
JPS5240979A true JPS5240979A (en) 1977-03-30
JPS608625B2 JPS608625B2 (en) 1985-03-04

Family

ID=14691528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50116614A Expired JPS608625B2 (en) 1975-09-26 1975-09-26 Characteristic testing equipment for semiconductor devices

Country Status (1)

Country Link
JP (1) JPS608625B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4827501A (en) * 1971-08-13 1973-04-11
JPS5036553A (en) * 1973-08-03 1975-04-05

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4827501A (en) * 1971-08-13 1973-04-11
JPS5036553A (en) * 1973-08-03 1975-04-05

Also Published As

Publication number Publication date
JPS608625B2 (en) 1985-03-04

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