JPS52127771A - Patern formation method of tin oxide film - Google Patents

Patern formation method of tin oxide film

Info

Publication number
JPS52127771A
JPS52127771A JP4502876A JP4502876A JPS52127771A JP S52127771 A JPS52127771 A JP S52127771A JP 4502876 A JP4502876 A JP 4502876A JP 4502876 A JP4502876 A JP 4502876A JP S52127771 A JPS52127771 A JP S52127771A
Authority
JP
Japan
Prior art keywords
oxide film
tin oxide
patern
formation method
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4502876A
Other languages
Japanese (ja)
Inventor
Jun Fukuchi
Shigetoshi Takayanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4502876A priority Critical patent/JPS52127771A/en
Publication of JPS52127771A publication Critical patent/JPS52127771A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To form the tiny pattern to the tin oxide film, using the SiO2 film as the etching mask, and by being made to react by HCl after forming the uniform metallic face by sticking metal such as Al or Zn by evaporation.
COPYRIGHT: (C)1977,JPO&Japio
JP4502876A 1976-04-20 1976-04-20 Patern formation method of tin oxide film Pending JPS52127771A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4502876A JPS52127771A (en) 1976-04-20 1976-04-20 Patern formation method of tin oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4502876A JPS52127771A (en) 1976-04-20 1976-04-20 Patern formation method of tin oxide film

Publications (1)

Publication Number Publication Date
JPS52127771A true JPS52127771A (en) 1977-10-26

Family

ID=12707866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4502876A Pending JPS52127771A (en) 1976-04-20 1976-04-20 Patern formation method of tin oxide film

Country Status (1)

Country Link
JP (1) JPS52127771A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9974214B2 (en) 2015-04-09 2018-05-15 Abb Schweiz Ag Cooled power conversion assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9974214B2 (en) 2015-04-09 2018-05-15 Abb Schweiz Ag Cooled power conversion assembly

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