JPS526477A - Method for multi-layer film formation - Google Patents

Method for multi-layer film formation

Info

Publication number
JPS526477A
JPS526477A JP8273875A JP8273875A JPS526477A JP S526477 A JPS526477 A JP S526477A JP 8273875 A JP8273875 A JP 8273875A JP 8273875 A JP8273875 A JP 8273875A JP S526477 A JPS526477 A JP S526477A
Authority
JP
Japan
Prior art keywords
film formation
layer film
metallic film
layer
etching process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8273875A
Other languages
Japanese (ja)
Inventor
Toshio Nakano
Akira Sasano
Haruo Matsumaru
Ken Tsutsui
Takeo Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Kokusai Denki Electric Inc
Original Assignee
Hitachi Denshi KK
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Denshi KK, Hitachi Ltd filed Critical Hitachi Denshi KK
Priority to JP8273875A priority Critical patent/JPS526477A/en
Publication of JPS526477A publication Critical patent/JPS526477A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To prevent undercutting the lower layer of metallic film, during etching process of the wire consisted of multi-layer metallic film.
COPYRIGHT: (C)1977,JPO&Japio
JP8273875A 1975-07-07 1975-07-07 Method for multi-layer film formation Pending JPS526477A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8273875A JPS526477A (en) 1975-07-07 1975-07-07 Method for multi-layer film formation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8273875A JPS526477A (en) 1975-07-07 1975-07-07 Method for multi-layer film formation

Publications (1)

Publication Number Publication Date
JPS526477A true JPS526477A (en) 1977-01-18

Family

ID=13782746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8273875A Pending JPS526477A (en) 1975-07-07 1975-07-07 Method for multi-layer film formation

Country Status (1)

Country Link
JP (1) JPS526477A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5863150A (en) * 1981-10-12 1983-04-14 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS6143449A (en) * 1984-08-08 1986-03-03 Hitachi Ltd Forming process of wiring pattern

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5863150A (en) * 1981-10-12 1983-04-14 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS6143449A (en) * 1984-08-08 1986-03-03 Hitachi Ltd Forming process of wiring pattern

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