JPS52136496A - Apparatus for ion beam machining - Google Patents

Apparatus for ion beam machining

Info

Publication number
JPS52136496A
JPS52136496A JP5222176A JP5222176A JPS52136496A JP S52136496 A JPS52136496 A JP S52136496A JP 5222176 A JP5222176 A JP 5222176A JP 5222176 A JP5222176 A JP 5222176A JP S52136496 A JPS52136496 A JP S52136496A
Authority
JP
Japan
Prior art keywords
ion beam
beam machining
prevent
neutralization
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5222176A
Other languages
Japanese (ja)
Inventor
Sumio Hosaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5222176A priority Critical patent/JPS52136496A/en
Publication of JPS52136496A publication Critical patent/JPS52136496A/en
Pending legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent adverse effect to machining elements by use of a device for neutralization to prevent concentration of electric field on insulating film and a sample equipped with a cooling mechanism to prevent rise in the temperature thereof.
COPYRIGHT: (C)1977,JPO&Japio
JP5222176A 1976-05-10 1976-05-10 Apparatus for ion beam machining Pending JPS52136496A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5222176A JPS52136496A (en) 1976-05-10 1976-05-10 Apparatus for ion beam machining

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5222176A JPS52136496A (en) 1976-05-10 1976-05-10 Apparatus for ion beam machining

Publications (1)

Publication Number Publication Date
JPS52136496A true JPS52136496A (en) 1977-11-15

Family

ID=12908685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5222176A Pending JPS52136496A (en) 1976-05-10 1976-05-10 Apparatus for ion beam machining

Country Status (1)

Country Link
JP (1) JPS52136496A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53125294U (en) * 1977-02-19 1978-10-05
JPS5879721A (en) * 1981-11-06 1983-05-13 Hitachi Ltd Tool for wafer etching
JPS62185324A (en) * 1986-02-12 1987-08-13 Hitachi Ltd Method and device for plasma treatment
JPH01143328A (en) * 1987-11-30 1989-06-05 Tokyo Electron Ltd Dry etching system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53125294U (en) * 1977-02-19 1978-10-05
JPS5879721A (en) * 1981-11-06 1983-05-13 Hitachi Ltd Tool for wafer etching
JPS62185324A (en) * 1986-02-12 1987-08-13 Hitachi Ltd Method and device for plasma treatment
JPH01143328A (en) * 1987-11-30 1989-06-05 Tokyo Electron Ltd Dry etching system

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