JPS5258367A - Formation of contact holes in semiconductor device - Google Patents

Formation of contact holes in semiconductor device

Info

Publication number
JPS5258367A
JPS5258367A JP13403775A JP13403775A JPS5258367A JP S5258367 A JPS5258367 A JP S5258367A JP 13403775 A JP13403775 A JP 13403775A JP 13403775 A JP13403775 A JP 13403775A JP S5258367 A JPS5258367 A JP S5258367A
Authority
JP
Japan
Prior art keywords
contact holes
formation
semiconductor device
holes
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13403775A
Other languages
Japanese (ja)
Inventor
Hiroshi Yokota
Seishiro Owaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13403775A priority Critical patent/JPS5258367A/en
Publication of JPS5258367A publication Critical patent/JPS5258367A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To form contact holes at high accuracy without causing defects such as pin holes in an insulating film.
COPYRIGHT: (C)1977,JPO&Japio
JP13403775A 1975-11-10 1975-11-10 Formation of contact holes in semiconductor device Pending JPS5258367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13403775A JPS5258367A (en) 1975-11-10 1975-11-10 Formation of contact holes in semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13403775A JPS5258367A (en) 1975-11-10 1975-11-10 Formation of contact holes in semiconductor device

Publications (1)

Publication Number Publication Date
JPS5258367A true JPS5258367A (en) 1977-05-13

Family

ID=15118883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13403775A Pending JPS5258367A (en) 1975-11-10 1975-11-10 Formation of contact holes in semiconductor device

Country Status (1)

Country Link
JP (1) JPS5258367A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141727A (en) * 1979-04-23 1980-11-05 Hitachi Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141727A (en) * 1979-04-23 1980-11-05 Hitachi Ltd Manufacture of semiconductor device

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