JPS5214367A - Semiconductor device on which the phosphosilicate glass layer is formed - Google Patents

Semiconductor device on which the phosphosilicate glass layer is formed

Info

Publication number
JPS5214367A
JPS5214367A JP50090298A JP9029875A JPS5214367A JP S5214367 A JPS5214367 A JP S5214367A JP 50090298 A JP50090298 A JP 50090298A JP 9029875 A JP9029875 A JP 9029875A JP S5214367 A JPS5214367 A JP S5214367A
Authority
JP
Japan
Prior art keywords
glass layer
phosphosilicate glass
semiconductor device
crack
humidity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50090298A
Other languages
Japanese (ja)
Inventor
Naoyuki Nagashima
Sumio Nishida
Toshiko Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50090298A priority Critical patent/JPS5214367A/en
Publication of JPS5214367A publication Critical patent/JPS5214367A/en
Pending legal-status Critical Current

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  • Formation Of Insulating Films (AREA)
  • Bipolar Transistors (AREA)

Abstract

PURPOSE:To avoid the generation of crack and to improve the humidity-resistance by making the phosphosilicate glass layer containing more than 2 mole percent of P2O5 on the surface of insulative oxide film.
JP50090298A 1975-07-25 1975-07-25 Semiconductor device on which the phosphosilicate glass layer is formed Pending JPS5214367A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50090298A JPS5214367A (en) 1975-07-25 1975-07-25 Semiconductor device on which the phosphosilicate glass layer is formed

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50090298A JPS5214367A (en) 1975-07-25 1975-07-25 Semiconductor device on which the phosphosilicate glass layer is formed

Publications (1)

Publication Number Publication Date
JPS5214367A true JPS5214367A (en) 1977-02-03

Family

ID=13994622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50090298A Pending JPS5214367A (en) 1975-07-25 1975-07-25 Semiconductor device on which the phosphosilicate glass layer is formed

Country Status (1)

Country Link
JP (1) JPS5214367A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551911A (en) * 1978-10-09 1980-04-16 Tsuyoshi Aoi Method and device for removing the arrested materials from exhaust gas cleaning apparatus
JPS5633844A (en) * 1979-08-28 1981-04-04 Nec Corp Semiconductor device and manufacture therefor
JPS61171813U (en) * 1985-04-12 1986-10-25
JPS61200408U (en) * 1985-06-04 1986-12-15
JPH0281914A (en) * 1988-09-20 1990-03-22 Hino Motors Ltd Filter washing device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4835773A (en) * 1971-09-10 1973-05-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4835773A (en) * 1971-09-10 1973-05-26

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551911A (en) * 1978-10-09 1980-04-16 Tsuyoshi Aoi Method and device for removing the arrested materials from exhaust gas cleaning apparatus
JPS5633844A (en) * 1979-08-28 1981-04-04 Nec Corp Semiconductor device and manufacture therefor
JPS61171813U (en) * 1985-04-12 1986-10-25
JPS61200408U (en) * 1985-06-04 1986-12-15
JPH0281914A (en) * 1988-09-20 1990-03-22 Hino Motors Ltd Filter washing device

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