JPS5240977A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5240977A
JPS5240977A JP50116992A JP11699275A JPS5240977A JP S5240977 A JPS5240977 A JP S5240977A JP 50116992 A JP50116992 A JP 50116992A JP 11699275 A JP11699275 A JP 11699275A JP S5240977 A JPS5240977 A JP S5240977A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
recess
fill
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50116992A
Other languages
Japanese (ja)
Inventor
Kosei Kajiwara
Tatsunori Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50116992A priority Critical patent/JPS5240977A/en
Publication of JPS5240977A publication Critical patent/JPS5240977A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To cover the surface of a semiconductor substrate of the portions other than a recess formed therein with a composite mask and fill the recess with radiation of oxygen ions, thereby forming a flat selective oxide film.
COPYRIGHT: (C)1977,JPO&Japio
JP50116992A 1975-09-26 1975-09-26 Process for production of semiconductor device Pending JPS5240977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50116992A JPS5240977A (en) 1975-09-26 1975-09-26 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50116992A JPS5240977A (en) 1975-09-26 1975-09-26 Process for production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5240977A true JPS5240977A (en) 1977-03-30

Family

ID=14700784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50116992A Pending JPS5240977A (en) 1975-09-26 1975-09-26 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5240977A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5261973A (en) * 1975-11-18 1977-05-21 Mitsubishi Electric Corp Production of semiconductor device
JPS5632732A (en) * 1979-08-27 1981-04-02 Mitsubishi Electric Corp Semiconductor device
JPS5637635A (en) * 1979-09-05 1981-04-11 Mitsubishi Electric Corp Manufacture of semiconductor device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918284A (en) * 1972-06-09 1974-02-18
JPS49134285A (en) * 1973-04-25 1974-12-24
JPS5160474A (en) * 1974-11-22 1976-05-26 Hitachi Ltd

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918284A (en) * 1972-06-09 1974-02-18
JPS49134285A (en) * 1973-04-25 1974-12-24
JPS5160474A (en) * 1974-11-22 1976-05-26 Hitachi Ltd

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5261973A (en) * 1975-11-18 1977-05-21 Mitsubishi Electric Corp Production of semiconductor device
JPS5632732A (en) * 1979-08-27 1981-04-02 Mitsubishi Electric Corp Semiconductor device
JPS5637635A (en) * 1979-09-05 1981-04-11 Mitsubishi Electric Corp Manufacture of semiconductor device

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