JPS52149475A - Liquid grown wafer and its production - Google Patents

Liquid grown wafer and its production

Info

Publication number
JPS52149475A
JPS52149475A JP6609876A JP6609876A JPS52149475A JP S52149475 A JPS52149475 A JP S52149475A JP 6609876 A JP6609876 A JP 6609876A JP 6609876 A JP6609876 A JP 6609876A JP S52149475 A JPS52149475 A JP S52149475A
Authority
JP
Japan
Prior art keywords
production
grown wafer
forming
liquid grown
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6609876A
Other languages
Japanese (ja)
Inventor
Kunihiro Katase
Kazutoshi Konno
Minoru Akatsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6609876A priority Critical patent/JPS52149475A/en
Publication of JPS52149475A publication Critical patent/JPS52149475A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To prevent the evaporation of contained impurities from wafer surface during the standby period in high temperature till the commencement of growth by forming a metal film on a compound semiconductor wafer and forming a grown layer thereon by a liquid phase epitaxial method.
COPYRIGHT: (C)1977,JPO&Japio
JP6609876A 1976-06-08 1976-06-08 Liquid grown wafer and its production Pending JPS52149475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6609876A JPS52149475A (en) 1976-06-08 1976-06-08 Liquid grown wafer and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6609876A JPS52149475A (en) 1976-06-08 1976-06-08 Liquid grown wafer and its production

Publications (1)

Publication Number Publication Date
JPS52149475A true JPS52149475A (en) 1977-12-12

Family

ID=13306055

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6609876A Pending JPS52149475A (en) 1976-06-08 1976-06-08 Liquid grown wafer and its production

Country Status (1)

Country Link
JP (1) JPS52149475A (en)

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