JPS5317065A - Liquid phase growth method for semiconductor substrate - Google Patents

Liquid phase growth method for semiconductor substrate

Info

Publication number
JPS5317065A
JPS5317065A JP9111476A JP9111476A JPS5317065A JP S5317065 A JPS5317065 A JP S5317065A JP 9111476 A JP9111476 A JP 9111476A JP 9111476 A JP9111476 A JP 9111476A JP S5317065 A JPS5317065 A JP S5317065A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
liquid phase
growth method
phase growth
horizontally
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9111476A
Other languages
Japanese (ja)
Inventor
Minoru Akatsuka
Kazutoshi Konno
Kunihiro Katase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9111476A priority Critical patent/JPS5317065A/en
Publication of JPS5317065A publication Critical patent/JPS5317065A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To form grown layers containing impurities evenly by providing wafers non-horizontally and contacting the upper and lower parts of the main surfaces thereof with different effective solution layer thicknesses.
COPYRIGHT: (C)1978,JPO&Japio
JP9111476A 1976-07-30 1976-07-30 Liquid phase growth method for semiconductor substrate Pending JPS5317065A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9111476A JPS5317065A (en) 1976-07-30 1976-07-30 Liquid phase growth method for semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9111476A JPS5317065A (en) 1976-07-30 1976-07-30 Liquid phase growth method for semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS5317065A true JPS5317065A (en) 1978-02-16

Family

ID=14017479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9111476A Pending JPS5317065A (en) 1976-07-30 1976-07-30 Liquid phase growth method for semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5317065A (en)

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