JPS52150976A - Making method of etching mask - Google Patents

Making method of etching mask

Info

Publication number
JPS52150976A
JPS52150976A JP6790476A JP6790476A JPS52150976A JP S52150976 A JPS52150976 A JP S52150976A JP 6790476 A JP6790476 A JP 6790476A JP 6790476 A JP6790476 A JP 6790476A JP S52150976 A JPS52150976 A JP S52150976A
Authority
JP
Japan
Prior art keywords
etching mask
making method
etched
developing
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6790476A
Other languages
Japanese (ja)
Inventor
Kazuto Suehiro
Shigeji Kinoshita
Kazushi Nagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6790476A priority Critical patent/JPS52150976A/en
Publication of JPS52150976A publication Critical patent/JPS52150976A/en
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)

Abstract

PURPOSE: To prevent the bonding of the volume swollen at the developing within the width of opening patterns by forming multilayer etching masks composed of photo resist films of required widths on a substrate to be etched.
COPYRIGHT: (C)1977,JPO&Japio
JP6790476A 1976-06-09 1976-06-09 Making method of etching mask Pending JPS52150976A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6790476A JPS52150976A (en) 1976-06-09 1976-06-09 Making method of etching mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6790476A JPS52150976A (en) 1976-06-09 1976-06-09 Making method of etching mask

Publications (1)

Publication Number Publication Date
JPS52150976A true JPS52150976A (en) 1977-12-15

Family

ID=13358338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6790476A Pending JPS52150976A (en) 1976-06-09 1976-06-09 Making method of etching mask

Country Status (1)

Country Link
JP (1) JPS52150976A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792836A (en) * 1980-12-01 1982-06-09 Hitachi Ltd Etching method polyimide resin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792836A (en) * 1980-12-01 1982-06-09 Hitachi Ltd Etching method polyimide resin film

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