JPS533821A - Exposure method - Google Patents

Exposure method

Info

Publication number
JPS533821A
JPS533821A JP7867776A JP7867776A JPS533821A JP S533821 A JPS533821 A JP S533821A JP 7867776 A JP7867776 A JP 7867776A JP 7867776 A JP7867776 A JP 7867776A JP S533821 A JPS533821 A JP S533821A
Authority
JP
Japan
Prior art keywords
exposure method
light
negative resist
accuracey
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7867776A
Other languages
Japanese (ja)
Inventor
Kazumasa Shigematsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7867776A priority Critical patent/JPS533821A/en
Publication of JPS533821A publication Critical patent/JPS533821A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To remove a detect deteriorating the accuracey of a pattern exposed to light in fitting electrodes or the like on a wafer, by exposing a negative resist to light after formation of a reflection preventing film on the negative resist.
COPYRIGHT: (C)1978,JPO&Japio
JP7867776A 1976-07-01 1976-07-01 Exposure method Pending JPS533821A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7867776A JPS533821A (en) 1976-07-01 1976-07-01 Exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7867776A JPS533821A (en) 1976-07-01 1976-07-01 Exposure method

Publications (1)

Publication Number Publication Date
JPS533821A true JPS533821A (en) 1978-01-13

Family

ID=13668492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7867776A Pending JPS533821A (en) 1976-07-01 1976-07-01 Exposure method

Country Status (1)

Country Link
JP (1) JPS533821A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038821A (en) * 1983-08-12 1985-02-28 Hitachi Ltd Etching method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038821A (en) * 1983-08-12 1985-02-28 Hitachi Ltd Etching method

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