JPS5223571A - Vapor phase reaction apparatus - Google Patents

Vapor phase reaction apparatus

Info

Publication number
JPS5223571A
JPS5223571A JP9983575A JP9983575A JPS5223571A JP S5223571 A JPS5223571 A JP S5223571A JP 9983575 A JP9983575 A JP 9983575A JP 9983575 A JP9983575 A JP 9983575A JP S5223571 A JPS5223571 A JP S5223571A
Authority
JP
Japan
Prior art keywords
vapor phase
phase reaction
reaction apparatus
dismounting
frequencies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9983575A
Other languages
Japanese (ja)
Other versions
JPS59253B2 (en
Inventor
Shinichi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50099835A priority Critical patent/JPS59253B2/en
Publication of JPS5223571A publication Critical patent/JPS5223571A/en
Publication of JPS59253B2 publication Critical patent/JPS59253B2/en
Expired legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: In an apparatus for performing vapor phase reaction such as vapor phase growth on semiconductor substrates, frequencies of mounting and dismounting of quartz plate are reduced.
COPYRIGHT: (C)1977,JPO&Japio
JP50099835A 1975-08-19 1975-08-19 Kisouhan no Souchi Expired JPS59253B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50099835A JPS59253B2 (en) 1975-08-19 1975-08-19 Kisouhan no Souchi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50099835A JPS59253B2 (en) 1975-08-19 1975-08-19 Kisouhan no Souchi

Publications (2)

Publication Number Publication Date
JPS5223571A true JPS5223571A (en) 1977-02-22
JPS59253B2 JPS59253B2 (en) 1984-01-06

Family

ID=14257860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50099835A Expired JPS59253B2 (en) 1975-08-19 1975-08-19 Kisouhan no Souchi

Country Status (1)

Country Link
JP (1) JPS59253B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191474U (en) * 1985-05-21 1986-11-28

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913659U (en) * 1972-05-04 1974-02-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913659U (en) * 1972-05-04 1974-02-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191474U (en) * 1985-05-21 1986-11-28

Also Published As

Publication number Publication date
JPS59253B2 (en) 1984-01-06

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