JPS5225574A - Production method of semiconsuctor device - Google Patents

Production method of semiconsuctor device

Info

Publication number
JPS5225574A
JPS5225574A JP10147975A JP10147975A JPS5225574A JP S5225574 A JPS5225574 A JP S5225574A JP 10147975 A JP10147975 A JP 10147975A JP 10147975 A JP10147975 A JP 10147975A JP S5225574 A JPS5225574 A JP S5225574A
Authority
JP
Japan
Prior art keywords
semiconsuctor
production method
etching
monitor
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10147975A
Other languages
Japanese (ja)
Inventor
Masanori Tosa
Seishi Izumi
Yoshimi Tsuchiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10147975A priority Critical patent/JPS5225574A/en
Publication of JPS5225574A publication Critical patent/JPS5225574A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To form the penetration hole without generating under-and over-etching on the protection film, by using a monitor with which the observation independent from the semiconductor is easy.
COPYRIGHT: (C)1977,JPO&Japio
JP10147975A 1975-08-21 1975-08-21 Production method of semiconsuctor device Pending JPS5225574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10147975A JPS5225574A (en) 1975-08-21 1975-08-21 Production method of semiconsuctor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10147975A JPS5225574A (en) 1975-08-21 1975-08-21 Production method of semiconsuctor device

Publications (1)

Publication Number Publication Date
JPS5225574A true JPS5225574A (en) 1977-02-25

Family

ID=14301847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10147975A Pending JPS5225574A (en) 1975-08-21 1975-08-21 Production method of semiconsuctor device

Country Status (1)

Country Link
JP (1) JPS5225574A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5152545A (en) * 1974-11-02 1976-05-10 Kawasaki Heavy Ind Ltd Kyushureitokino ketsushoboshisochi
JPS5152547A (en) * 1974-11-02 1976-05-10 Kawasaki Heavy Ind Ltd Kyushureitokino untenteishihoshiki
JPS5627933A (en) * 1979-08-14 1981-03-18 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837225A (en) * 1971-09-14 1973-06-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837225A (en) * 1971-09-14 1973-06-01

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5152545A (en) * 1974-11-02 1976-05-10 Kawasaki Heavy Ind Ltd Kyushureitokino ketsushoboshisochi
JPS5152547A (en) * 1974-11-02 1976-05-10 Kawasaki Heavy Ind Ltd Kyushureitokino untenteishihoshiki
JPS5627933A (en) * 1979-08-14 1981-03-18 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device

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