JPS5227363A - Formation method of glass film - Google Patents
Formation method of glass filmInfo
- Publication number
- JPS5227363A JPS5227363A JP10297675A JP10297675A JPS5227363A JP S5227363 A JPS5227363 A JP S5227363A JP 10297675 A JP10297675 A JP 10297675A JP 10297675 A JP10297675 A JP 10297675A JP S5227363 A JPS5227363 A JP S5227363A
- Authority
- JP
- Japan
- Prior art keywords
- glass film
- formation method
- lay
- grooves
- enables
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title abstract 3
- 230000015572 biosynthetic process Effects 0.000 title abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: A formation method of glass film, which enables to lay desired glass film into the grooves of electric conductor of silicon substrate, etc.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10297675A JPS5227363A (en) | 1975-08-27 | 1975-08-27 | Formation method of glass film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10297675A JPS5227363A (en) | 1975-08-27 | 1975-08-27 | Formation method of glass film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5227363A true JPS5227363A (en) | 1977-03-01 |
Family
ID=14341762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10297675A Pending JPS5227363A (en) | 1975-08-27 | 1975-08-27 | Formation method of glass film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5227363A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53118979A (en) * | 1977-03-28 | 1978-10-17 | Toshiba Corp | Forming method of glass thin film on semiconductor element substrate |
| JPS5490969A (en) * | 1977-12-28 | 1979-07-19 | Hitachi Ltd | Glass attaching method to semiconductor groove |
-
1975
- 1975-08-27 JP JP10297675A patent/JPS5227363A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53118979A (en) * | 1977-03-28 | 1978-10-17 | Toshiba Corp | Forming method of glass thin film on semiconductor element substrate |
| JPS5490969A (en) * | 1977-12-28 | 1979-07-19 | Hitachi Ltd | Glass attaching method to semiconductor groove |
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