JPS5240082A - Resistor element and process for production of same - Google Patents

Resistor element and process for production of same

Info

Publication number
JPS5240082A
JPS5240082A JP50115830A JP11583075A JPS5240082A JP S5240082 A JPS5240082 A JP S5240082A JP 50115830 A JP50115830 A JP 50115830A JP 11583075 A JP11583075 A JP 11583075A JP S5240082 A JPS5240082 A JP S5240082A
Authority
JP
Japan
Prior art keywords
resistor element
production
same
silicon oxide
theredy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50115830A
Other languages
Japanese (ja)
Inventor
Hiroshi Shiba
Kunio Aomura
Toru Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP50115830A priority Critical patent/JPS5240082A/en
Publication of JPS5240082A publication Critical patent/JPS5240082A/en
Pending legal-status Critical Current

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  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To form a resistor element by converting polycrystalline sillicon to silicon oxide and further adding impurity atoms to the silicon oxide, theredy facilitating design and achieving higher density of integration.
COPYRIGHT: (C)1977,JPO&Japio
JP50115830A 1975-09-25 1975-09-25 Resistor element and process for production of same Pending JPS5240082A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50115830A JPS5240082A (en) 1975-09-25 1975-09-25 Resistor element and process for production of same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50115830A JPS5240082A (en) 1975-09-25 1975-09-25 Resistor element and process for production of same

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP58014384A Division JPS58130555A (en) 1983-01-31 1983-01-31 semiconductor equipment

Publications (1)

Publication Number Publication Date
JPS5240082A true JPS5240082A (en) 1977-03-28

Family

ID=14672164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50115830A Pending JPS5240082A (en) 1975-09-25 1975-09-25 Resistor element and process for production of same

Country Status (1)

Country Link
JP (1) JPS5240082A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516444A (en) * 1978-07-24 1980-02-05 Hitachi Ltd Producing method of semiconductor thin film resistance
JPS5682608A (en) * 1979-12-08 1981-07-06 Toyo Tire & Rubber Co Ltd Radial tyre for passenger car
JPS6196756A (en) * 1984-10-17 1986-05-15 Nec Corp Semiconductor device and its manufacturing method
JPS6196755A (en) * 1984-10-17 1986-05-15 Nec Corp Semiconductor device and its manufacturing method
JPS61120456A (en) * 1984-11-16 1986-06-07 Nec Corp semiconductor equipment

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933434A (en) * 1972-07-20 1974-03-27
JPS4984588A (en) * 1972-12-19 1974-08-14
JPS5138884A (en) * 1974-09-27 1976-03-31 Tokyo Shibaura Electric Co

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933434A (en) * 1972-07-20 1974-03-27
JPS4984588A (en) * 1972-12-19 1974-08-14
JPS5138884A (en) * 1974-09-27 1976-03-31 Tokyo Shibaura Electric Co

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516444A (en) * 1978-07-24 1980-02-05 Hitachi Ltd Producing method of semiconductor thin film resistance
JPS5682608A (en) * 1979-12-08 1981-07-06 Toyo Tire & Rubber Co Ltd Radial tyre for passenger car
JPS6196756A (en) * 1984-10-17 1986-05-15 Nec Corp Semiconductor device and its manufacturing method
JPS6196755A (en) * 1984-10-17 1986-05-15 Nec Corp Semiconductor device and its manufacturing method
JPS61120456A (en) * 1984-11-16 1986-06-07 Nec Corp semiconductor equipment

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