JPS5240086A - Process for production of semiconductor device - Google Patents
Process for production of semiconductor deviceInfo
- Publication number
- JPS5240086A JPS5240086A JP11611375A JP11611375A JPS5240086A JP S5240086 A JPS5240086 A JP S5240086A JP 11611375 A JP11611375 A JP 11611375A JP 11611375 A JP11611375 A JP 11611375A JP S5240086 A JPS5240086 A JP S5240086A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- oxide film
- nitride film
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 238000009792 diffusion process Methods 0.000 abstract 2
- 150000004767 nitrides Chemical class 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: Double layers of an oxide film and nitride film are formed and diffusion layers are formed by excess etching of the oxide film with the nitride film as a mask, whereby development of contact holes to a size bigger than the diffusion layer is prevented.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11611375A JPS5240086A (en) | 1975-09-26 | 1975-09-26 | Process for production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11611375A JPS5240086A (en) | 1975-09-26 | 1975-09-26 | Process for production of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5240086A true JPS5240086A (en) | 1977-03-28 |
Family
ID=14679002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11611375A Pending JPS5240086A (en) | 1975-09-26 | 1975-09-26 | Process for production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5240086A (en) |
-
1975
- 1975-09-26 JP JP11611375A patent/JPS5240086A/en active Pending
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