JPS5242376A - Photomask - Google Patents

Photomask

Info

Publication number
JPS5242376A
JPS5242376A JP11848775A JP11848775A JPS5242376A JP S5242376 A JPS5242376 A JP S5242376A JP 11848775 A JP11848775 A JP 11848775A JP 11848775 A JP11848775 A JP 11848775A JP S5242376 A JPS5242376 A JP S5242376A
Authority
JP
Japan
Prior art keywords
photomask
undulations
absorbing
semiconductor substrate
reflection light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11848775A
Other languages
English (en)
Inventor
Yujiro Sakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP11848775A priority Critical patent/JPS5242376A/ja
Publication of JPS5242376A publication Critical patent/JPS5242376A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP11848775A 1975-09-30 1975-09-30 Photomask Pending JPS5242376A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11848775A JPS5242376A (en) 1975-09-30 1975-09-30 Photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11848775A JPS5242376A (en) 1975-09-30 1975-09-30 Photomask

Publications (1)

Publication Number Publication Date
JPS5242376A true JPS5242376A (en) 1977-04-01

Family

ID=14737881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11848775A Pending JPS5242376A (en) 1975-09-30 1975-09-30 Photomask

Country Status (1)

Country Link
JP (1) JPS5242376A (ja)

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