JPS5242379A - Method of inspecting pinholes of insulating film formed on semiconduct or surface - Google Patents

Method of inspecting pinholes of insulating film formed on semiconduct or surface

Info

Publication number
JPS5242379A
JPS5242379A JP11769575A JP11769575A JPS5242379A JP S5242379 A JPS5242379 A JP S5242379A JP 11769575 A JP11769575 A JP 11769575A JP 11769575 A JP11769575 A JP 11769575A JP S5242379 A JPS5242379 A JP S5242379A
Authority
JP
Japan
Prior art keywords
insulating film
semiconduct
film formed
pinholes
inspecting pinholes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11769575A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11769575A priority Critical patent/JPS5242379A/en
Publication of JPS5242379A publication Critical patent/JPS5242379A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: A pn junction is beforehand formed on the surface of a semiconductor substrate beneath the insulating film to be examined, then the surface of the insulating film is scanned by light beams and pinholes are pictured on a display tube by photocurrent excited by light at the pn junction, whereby the pinholes are observed.
COPYRIGHT: (C)1977,JPO&Japio
JP11769575A 1975-10-01 1975-10-01 Method of inspecting pinholes of insulating film formed on semiconduct or surface Pending JPS5242379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11769575A JPS5242379A (en) 1975-10-01 1975-10-01 Method of inspecting pinholes of insulating film formed on semiconduct or surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11769575A JPS5242379A (en) 1975-10-01 1975-10-01 Method of inspecting pinholes of insulating film formed on semiconduct or surface

Publications (1)

Publication Number Publication Date
JPS5242379A true JPS5242379A (en) 1977-04-01

Family

ID=14717999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11769575A Pending JPS5242379A (en) 1975-10-01 1975-10-01 Method of inspecting pinholes of insulating film formed on semiconduct or surface

Country Status (1)

Country Link
JP (1) JPS5242379A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521056A (en) * 1978-08-01 1980-02-14 Chiyou Lsi Gijutsu Kenkyu Kumiai Laser scanning microscopic apparatus
JPH10107402A (en) * 1996-09-30 1998-04-24 Nec Corp Insulating film pinhole inspection method and apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521056A (en) * 1978-08-01 1980-02-14 Chiyou Lsi Gijutsu Kenkyu Kumiai Laser scanning microscopic apparatus
JPH10107402A (en) * 1996-09-30 1998-04-24 Nec Corp Insulating film pinhole inspection method and apparatus

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