JPS5351978A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5351978A JPS5351978A JP12610276A JP12610276A JPS5351978A JP S5351978 A JPS5351978 A JP S5351978A JP 12610276 A JP12610276 A JP 12610276A JP 12610276 A JP12610276 A JP 12610276A JP S5351978 A JPS5351978 A JP S5351978A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- proof
- save
- surrounding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 230000002950 deficient Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To save the material and to improve the device yield rate, by processing the next step after coating the defective device and its surrounding with insulating film of heat-proof and chemical-proof prior to the formation of the conductive layer on semiconductor wafer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12610276A JPS5351978A (en) | 1976-10-22 | 1976-10-22 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12610276A JPS5351978A (en) | 1976-10-22 | 1976-10-22 | Manufacture of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5351978A true JPS5351978A (en) | 1978-05-11 |
Family
ID=14926654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12610276A Pending JPS5351978A (en) | 1976-10-22 | 1976-10-22 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5351978A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004095579A1 (en) * | 2003-04-23 | 2004-11-04 | Fujitsu Limited | Method of producing semiconductor integrated circuit device on soi substrate |
-
1976
- 1976-10-22 JP JP12610276A patent/JPS5351978A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004095579A1 (en) * | 2003-04-23 | 2004-11-04 | Fujitsu Limited | Method of producing semiconductor integrated circuit device on soi substrate |
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