JPS5250164A - Process for production of semiconductor single crystal - Google Patents

Process for production of semiconductor single crystal

Info

Publication number
JPS5250164A
JPS5250164A JP12594175A JP12594175A JPS5250164A JP S5250164 A JPS5250164 A JP S5250164A JP 12594175 A JP12594175 A JP 12594175A JP 12594175 A JP12594175 A JP 12594175A JP S5250164 A JPS5250164 A JP S5250164A
Authority
JP
Japan
Prior art keywords
single crystal
production
semiconductor single
semiconductor
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12594175A
Other languages
Japanese (ja)
Other versions
JPS5314911B2 (en
Inventor
Yoshihiro Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP12594175A priority Critical patent/JPS5250164A/en
Publication of JPS5250164A publication Critical patent/JPS5250164A/en
Publication of JPS5314911B2 publication Critical patent/JPS5314911B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: Oxygen is removed during growing in a pulling growth method of semiconductor single crystal, whereby a semiconductor crystal of high purity is produced.
COPYRIGHT: (C)1977,JPO&Japio
JP12594175A 1975-10-21 1975-10-21 Process for production of semiconductor single crystal Granted JPS5250164A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12594175A JPS5250164A (en) 1975-10-21 1975-10-21 Process for production of semiconductor single crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12594175A JPS5250164A (en) 1975-10-21 1975-10-21 Process for production of semiconductor single crystal

Publications (2)

Publication Number Publication Date
JPS5250164A true JPS5250164A (en) 1977-04-21
JPS5314911B2 JPS5314911B2 (en) 1978-05-20

Family

ID=14922749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12594175A Granted JPS5250164A (en) 1975-10-21 1975-10-21 Process for production of semiconductor single crystal

Country Status (1)

Country Link
JP (1) JPS5250164A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8083852B2 (en) * 2008-05-08 2011-12-27 Shin-Etsu Handotai Co., Ltd. Single crystal growth method and single crystal pulling apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8083852B2 (en) * 2008-05-08 2011-12-27 Shin-Etsu Handotai Co., Ltd. Single crystal growth method and single crystal pulling apparatus

Also Published As

Publication number Publication date
JPS5314911B2 (en) 1978-05-20

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