JPS5250165A - Semiconductor diffusion method - Google Patents

Semiconductor diffusion method

Info

Publication number
JPS5250165A
JPS5250165A JP12617375A JP12617375A JPS5250165A JP S5250165 A JPS5250165 A JP S5250165A JP 12617375 A JP12617375 A JP 12617375A JP 12617375 A JP12617375 A JP 12617375A JP S5250165 A JPS5250165 A JP S5250165A
Authority
JP
Japan
Prior art keywords
diffusion method
type
semiconductor diffusion
diffusion
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12617375A
Other languages
Japanese (ja)
Inventor
Yoshizo Hagimoto
Iwao Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12617375A priority Critical patent/JPS5250165A/en
Publication of JPS5250165A publication Critical patent/JPS5250165A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To form P type and n type diffusion layers by one diffusion, by simultaneous diffusion of one or alloyed state impurities of three kinds of Al, Ga, P as an impurity source into an n type Si wafer by a sealed tube method.
COPYRIGHT: (C)1977,JPO&Japio
JP12617375A 1975-10-20 1975-10-20 Semiconductor diffusion method Pending JPS5250165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12617375A JPS5250165A (en) 1975-10-20 1975-10-20 Semiconductor diffusion method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12617375A JPS5250165A (en) 1975-10-20 1975-10-20 Semiconductor diffusion method

Publications (1)

Publication Number Publication Date
JPS5250165A true JPS5250165A (en) 1977-04-21

Family

ID=14928475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12617375A Pending JPS5250165A (en) 1975-10-20 1975-10-20 Semiconductor diffusion method

Country Status (1)

Country Link
JP (1) JPS5250165A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635415A (en) * 1979-08-23 1981-04-08 Westinghouse Electric Corp Method of doping wafer of semiconductor material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635415A (en) * 1979-08-23 1981-04-08 Westinghouse Electric Corp Method of doping wafer of semiconductor material

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