JPS5250711A - Process for production of slider - Google Patents

Process for production of slider

Info

Publication number
JPS5250711A
JPS5250711A JP12638775A JP12638775A JPS5250711A JP S5250711 A JPS5250711 A JP S5250711A JP 12638775 A JP12638775 A JP 12638775A JP 12638775 A JP12638775 A JP 12638775A JP S5250711 A JPS5250711 A JP S5250711A
Authority
JP
Japan
Prior art keywords
slider
production
photoetching
substrate serving
working accuracy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12638775A
Other languages
Japanese (ja)
Inventor
Katsu Tamura
Masanobu Hanazono
Osamu Asai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12638775A priority Critical patent/JPS5250711A/en
Publication of JPS5250711A publication Critical patent/JPS5250711A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • ing And Chemical Polishing (AREA)
  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)

Abstract

PURPOSE:To form floating grooves in an Si substrate serving also as a slider, by photoetching, thereby preventing damaging and improving working accuracy.
JP12638775A 1975-10-22 1975-10-22 Process for production of slider Pending JPS5250711A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12638775A JPS5250711A (en) 1975-10-22 1975-10-22 Process for production of slider

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12638775A JPS5250711A (en) 1975-10-22 1975-10-22 Process for production of slider

Publications (1)

Publication Number Publication Date
JPS5250711A true JPS5250711A (en) 1977-04-23

Family

ID=14933874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12638775A Pending JPS5250711A (en) 1975-10-22 1975-10-22 Process for production of slider

Country Status (1)

Country Link
JP (1) JPS5250711A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2559296A1 (en) * 1984-02-03 1985-08-09 Commissariat Energie Atomique NEW CATAMARAN-TYPE SKATE FOR MAGNETIC RECORDING HEADS AND METHOD FOR MANUFACTURING THE SAME
US7196016B2 (en) 2003-09-29 2007-03-27 Hitachi Global Storage Technologies Netherlands, B.V. Fabrication process for preparing recording head sliders made from silicon substrates with SiO2 overcoats

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2559296A1 (en) * 1984-02-03 1985-08-09 Commissariat Energie Atomique NEW CATAMARAN-TYPE SKATE FOR MAGNETIC RECORDING HEADS AND METHOD FOR MANUFACTURING THE SAME
US4698708A (en) * 1984-02-03 1987-10-06 Commissariat A L'energie Atomique Device for magnetically reading and writing on a flying support
US7196016B2 (en) 2003-09-29 2007-03-27 Hitachi Global Storage Technologies Netherlands, B.V. Fabrication process for preparing recording head sliders made from silicon substrates with SiO2 overcoats

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