JPS525261A - Wafer shifting - Google Patents

Wafer shifting

Info

Publication number
JPS525261A
JPS525261A JP50081551A JP8155175A JPS525261A JP S525261 A JPS525261 A JP S525261A JP 50081551 A JP50081551 A JP 50081551A JP 8155175 A JP8155175 A JP 8155175A JP S525261 A JPS525261 A JP S525261A
Authority
JP
Japan
Prior art keywords
wafer shifting
shifting
wafer
holders
work efficiency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50081551A
Other languages
Japanese (ja)
Inventor
Nobuo Hashizume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP50081551A priority Critical patent/JPS525261A/en
Publication of JPS525261A publication Critical patent/JPS525261A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: Work efficiency enhancement by instantaneous quick shifting of multiple wafers between two holders having different wafer pitch interval.
COPYRIGHT: (C)1977,JPO&Japio
JP50081551A 1975-07-01 1975-07-01 Wafer shifting Pending JPS525261A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50081551A JPS525261A (en) 1975-07-01 1975-07-01 Wafer shifting

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50081551A JPS525261A (en) 1975-07-01 1975-07-01 Wafer shifting

Publications (1)

Publication Number Publication Date
JPS525261A true JPS525261A (en) 1977-01-14

Family

ID=13749418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50081551A Pending JPS525261A (en) 1975-07-01 1975-07-01 Wafer shifting

Country Status (1)

Country Link
JP (1) JPS525261A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0286472U (en) * 1988-12-23 1990-07-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0286472U (en) * 1988-12-23 1990-07-09

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