JPS529379A - Semiconductor device manufacturing process - Google Patents

Semiconductor device manufacturing process

Info

Publication number
JPS529379A
JPS529379A JP8552175A JP8552175A JPS529379A JP S529379 A JPS529379 A JP S529379A JP 8552175 A JP8552175 A JP 8552175A JP 8552175 A JP8552175 A JP 8552175A JP S529379 A JPS529379 A JP S529379A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing process
device manufacturing
oxidized film
sacrigicing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8552175A
Other languages
Japanese (ja)
Other versions
JPS541616B2 (en
Inventor
Fumio Miyake
Hirotsugu Hattori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP8552175A priority Critical patent/JPS529379A/en
Publication of JPS529379A publication Critical patent/JPS529379A/en
Publication of JPS541616B2 publication Critical patent/JPS541616B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To make semiconductor device permitting ohmic contact without sacrigicing electrical performance by simultaneously processing Si oxidized film and Si oxidized film containing P at a low temperature.
COPYRIGHT: (C)1977,JPO&Japio
JP8552175A 1975-07-11 1975-07-11 Semiconductor device manufacturing process Granted JPS529379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8552175A JPS529379A (en) 1975-07-11 1975-07-11 Semiconductor device manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8552175A JPS529379A (en) 1975-07-11 1975-07-11 Semiconductor device manufacturing process

Publications (2)

Publication Number Publication Date
JPS529379A true JPS529379A (en) 1977-01-24
JPS541616B2 JPS541616B2 (en) 1979-01-26

Family

ID=13861200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8552175A Granted JPS529379A (en) 1975-07-11 1975-07-11 Semiconductor device manufacturing process

Country Status (1)

Country Link
JP (1) JPS529379A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5414684A (en) * 1977-07-06 1979-02-03 Fuji Electric Co Ltd Manufacture of schottky barrier diode
JPS5975635A (en) * 1982-10-22 1984-04-28 Fuji Electric Corp Res & Dev Ltd Manufacture of semiconductor device
JPS60142399A (en) * 1983-12-29 1985-07-27 ボデイソニツク株式会社 Rhythm detector
JPS62152493A (en) * 1985-12-26 1987-07-07 任天堂株式会社 Rhythm response toy
JPS62166398A (en) * 1986-01-20 1987-07-22 松下電器産業株式会社 Rhythm component detector
JPS62166397A (en) * 1986-01-20 1987-07-22 松下電器産業株式会社 Rhythm component detection device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5414684A (en) * 1977-07-06 1979-02-03 Fuji Electric Co Ltd Manufacture of schottky barrier diode
JPS5975635A (en) * 1982-10-22 1984-04-28 Fuji Electric Corp Res & Dev Ltd Manufacture of semiconductor device
JPS60142399A (en) * 1983-12-29 1985-07-27 ボデイソニツク株式会社 Rhythm detector
JPS62152493A (en) * 1985-12-26 1987-07-07 任天堂株式会社 Rhythm response toy
JPS62166398A (en) * 1986-01-20 1987-07-22 松下電器産業株式会社 Rhythm component detector
JPS62166397A (en) * 1986-01-20 1987-07-22 松下電器産業株式会社 Rhythm component detection device

Also Published As

Publication number Publication date
JPS541616B2 (en) 1979-01-26

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