JPS5262496A - Element analyzer - Google Patents

Element analyzer

Info

Publication number
JPS5262496A
JPS5262496A JP50138141A JP13814175A JPS5262496A JP S5262496 A JPS5262496 A JP S5262496A JP 50138141 A JP50138141 A JP 50138141A JP 13814175 A JP13814175 A JP 13814175A JP S5262496 A JPS5262496 A JP S5262496A
Authority
JP
Japan
Prior art keywords
specimen surface
element analyzer
analysis
scanning
crt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50138141A
Other languages
Japanese (ja)
Inventor
Kiyoshi Ishikawa
Kazunobu Hayakawa
Masahide Okumura
Nobuo Hamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50138141A priority Critical patent/JPS5262496A/en
Publication of JPS5262496A publication Critical patent/JPS5262496A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To display scanning images on a CRT and make possible the analysis of arbitrary portions only of the specimen surface requiring analysis by attaching an electron beam system to an ion microanalyzer and scanning the specimen surface.
JP50138141A 1975-11-19 1975-11-19 Element analyzer Pending JPS5262496A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50138141A JPS5262496A (en) 1975-11-19 1975-11-19 Element analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50138141A JPS5262496A (en) 1975-11-19 1975-11-19 Element analyzer

Publications (1)

Publication Number Publication Date
JPS5262496A true JPS5262496A (en) 1977-05-23

Family

ID=15214951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50138141A Pending JPS5262496A (en) 1975-11-19 1975-11-19 Element analyzer

Country Status (1)

Country Link
JP (1) JPS5262496A (en)

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