JPS5263080A - Production of semiconductor integrated circuit device - Google Patents

Production of semiconductor integrated circuit device

Info

Publication number
JPS5263080A
JPS5263080A JP50139055A JP13905575A JPS5263080A JP S5263080 A JPS5263080 A JP S5263080A JP 50139055 A JP50139055 A JP 50139055A JP 13905575 A JP13905575 A JP 13905575A JP S5263080 A JPS5263080 A JP S5263080A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
circuit device
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50139055A
Other languages
Japanese (ja)
Inventor
Tsutomu Fujita
Haruyasu Yamada
Toyoki Takemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50139055A priority Critical patent/JPS5263080A/en
Publication of JPS5263080A publication Critical patent/JPS5263080A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)

Abstract

PURPOSE: To improve the hFE of an I2L element by forming first and seccond n type buried layers on a P type substrate and an n type epitaxial layer thereon respectively and forming the I2L and bipolar transistor thereon.
COPYRIGHT: (C)1977,JPO&Japio
JP50139055A 1975-11-18 1975-11-18 Production of semiconductor integrated circuit device Pending JPS5263080A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50139055A JPS5263080A (en) 1975-11-18 1975-11-18 Production of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50139055A JPS5263080A (en) 1975-11-18 1975-11-18 Production of semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS5263080A true JPS5263080A (en) 1977-05-25

Family

ID=15236417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50139055A Pending JPS5263080A (en) 1975-11-18 1975-11-18 Production of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5263080A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562761A (en) * 1978-11-01 1980-05-12 Nec Corp Semiconductor integrated circuit device
JPS56157054A (en) * 1980-05-08 1981-12-04 Oki Electric Ind Co Ltd Manufacture of semiconductor ic
JP2008268211A (en) * 2007-04-19 2008-11-06 Shen-Mu Kao Rotary meter head structure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562761A (en) * 1978-11-01 1980-05-12 Nec Corp Semiconductor integrated circuit device
JPS56157054A (en) * 1980-05-08 1981-12-04 Oki Electric Ind Co Ltd Manufacture of semiconductor ic
JP2008268211A (en) * 2007-04-19 2008-11-06 Shen-Mu Kao Rotary meter head structure

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