JPS5263681A - Production of mesa type semiconductor device - Google Patents
Production of mesa type semiconductor deviceInfo
- Publication number
- JPS5263681A JPS5263681A JP50139826A JP13982675A JPS5263681A JP S5263681 A JPS5263681 A JP S5263681A JP 50139826 A JP50139826 A JP 50139826A JP 13982675 A JP13982675 A JP 13982675A JP S5263681 A JPS5263681 A JP S5263681A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- type semiconductor
- production
- mesa type
- mesa
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000004140 cleaning Methods 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Bipolar Transistors (AREA)
Abstract
PURPOSE: To improve the electrical characteristics of a mesa type semiconductor device by performing repeated mesa etching in order to remove the stain film deposited on a semiconductor substrate and cleaning the subxtance surface by removing the once-formed SiO2 film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50139826A JPS5263681A (en) | 1975-11-20 | 1975-11-20 | Production of mesa type semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50139826A JPS5263681A (en) | 1975-11-20 | 1975-11-20 | Production of mesa type semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5263681A true JPS5263681A (en) | 1977-05-26 |
Family
ID=15254366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50139826A Pending JPS5263681A (en) | 1975-11-20 | 1975-11-20 | Production of mesa type semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5263681A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04206640A (en) * | 1990-11-30 | 1992-07-28 | Mitsuba Electric Mfg Co Ltd | Method for forming mesa type semiconductor device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4960684A (en) * | 1972-10-12 | 1974-06-12 |
-
1975
- 1975-11-20 JP JP50139826A patent/JPS5263681A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4960684A (en) * | 1972-10-12 | 1974-06-12 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04206640A (en) * | 1990-11-30 | 1992-07-28 | Mitsuba Electric Mfg Co Ltd | Method for forming mesa type semiconductor device |
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