JPS5263681A - Production of mesa type semiconductor device - Google Patents

Production of mesa type semiconductor device

Info

Publication number
JPS5263681A
JPS5263681A JP50139826A JP13982675A JPS5263681A JP S5263681 A JPS5263681 A JP S5263681A JP 50139826 A JP50139826 A JP 50139826A JP 13982675 A JP13982675 A JP 13982675A JP S5263681 A JPS5263681 A JP S5263681A
Authority
JP
Japan
Prior art keywords
semiconductor device
type semiconductor
production
mesa type
mesa
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50139826A
Other languages
Japanese (ja)
Inventor
Hideo Kawasaki
Kenji Hirakawa
Susumu Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP50139826A priority Critical patent/JPS5263681A/en
Publication of JPS5263681A publication Critical patent/JPS5263681A/en
Pending legal-status Critical Current

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  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To improve the electrical characteristics of a mesa type semiconductor device by performing repeated mesa etching in order to remove the stain film deposited on a semiconductor substrate and cleaning the subxtance surface by removing the once-formed SiO2 film.
COPYRIGHT: (C)1977,JPO&Japio
JP50139826A 1975-11-20 1975-11-20 Production of mesa type semiconductor device Pending JPS5263681A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50139826A JPS5263681A (en) 1975-11-20 1975-11-20 Production of mesa type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50139826A JPS5263681A (en) 1975-11-20 1975-11-20 Production of mesa type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5263681A true JPS5263681A (en) 1977-05-26

Family

ID=15254366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50139826A Pending JPS5263681A (en) 1975-11-20 1975-11-20 Production of mesa type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5263681A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04206640A (en) * 1990-11-30 1992-07-28 Mitsuba Electric Mfg Co Ltd Method for forming mesa type semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960684A (en) * 1972-10-12 1974-06-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960684A (en) * 1972-10-12 1974-06-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04206640A (en) * 1990-11-30 1992-07-28 Mitsuba Electric Mfg Co Ltd Method for forming mesa type semiconductor device

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