JPS538082A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS538082A
JPS538082A JP8148976A JP8148976A JPS538082A JP S538082 A JPS538082 A JP S538082A JP 8148976 A JP8148976 A JP 8148976A JP 8148976 A JP8148976 A JP 8148976A JP S538082 A JPS538082 A JP S538082A
Authority
JP
Japan
Prior art keywords
substrate
production
semiconductor device
oxide film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8148976A
Other languages
Japanese (ja)
Inventor
Nobuhisa Kubota
Nozomi Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8148976A priority Critical patent/JPS538082A/en
Publication of JPS538082A publication Critical patent/JPS538082A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Semiconductor Memories (AREA)

Abstract

PURPOSE: To increase getter effect by forming a field oxide film, then removing the oxide film on the rear surface of a substrate to expose the substrate surface thereafter gettering phosphorus, at the time of forming circuits in a Si substrate using a copalanar method.
COPYRIGHT: (C)1978,JPO&Japio
JP8148976A 1976-07-10 1976-07-10 Production of semiconductor device Pending JPS538082A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8148976A JPS538082A (en) 1976-07-10 1976-07-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8148976A JPS538082A (en) 1976-07-10 1976-07-10 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS538082A true JPS538082A (en) 1978-01-25

Family

ID=13747805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8148976A Pending JPS538082A (en) 1976-07-10 1976-07-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS538082A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146961A (en) * 1979-05-02 1980-11-15 Hitachi Ltd Semiconductor memory device
JPS55162258A (en) * 1979-06-05 1980-12-17 Fujitsu Ltd Semiconductor memory device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146961A (en) * 1979-05-02 1980-11-15 Hitachi Ltd Semiconductor memory device
JPS55162258A (en) * 1979-06-05 1980-12-17 Fujitsu Ltd Semiconductor memory device

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