JPS526466A - Manufacturing method of semi-conductors - Google Patents

Manufacturing method of semi-conductors

Info

Publication number
JPS526466A
JPS526466A JP8245575A JP8245575A JPS526466A JP S526466 A JPS526466 A JP S526466A JP 8245575 A JP8245575 A JP 8245575A JP 8245575 A JP8245575 A JP 8245575A JP S526466 A JPS526466 A JP S526466A
Authority
JP
Japan
Prior art keywords
conductors
semi
manufacturing
areas
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8245575A
Other languages
Japanese (ja)
Inventor
Katsumi Umeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP8245575A priority Critical patent/JPS526466A/en
Publication of JPS526466A publication Critical patent/JPS526466A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: Simultaneous formation of the areas with more than one impurity density by controlling the thickness of mask film and the shooting energy of impure ions.
COPYRIGHT: (C)1977,JPO&Japio
JP8245575A 1975-07-04 1975-07-04 Manufacturing method of semi-conductors Pending JPS526466A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8245575A JPS526466A (en) 1975-07-04 1975-07-04 Manufacturing method of semi-conductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8245575A JPS526466A (en) 1975-07-04 1975-07-04 Manufacturing method of semi-conductors

Publications (1)

Publication Number Publication Date
JPS526466A true JPS526466A (en) 1977-01-18

Family

ID=13774980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8245575A Pending JPS526466A (en) 1975-07-04 1975-07-04 Manufacturing method of semi-conductors

Country Status (1)

Country Link
JP (1) JPS526466A (en)

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