JPS5295975A - Prevention of leak of impurity in manufacturing semiconductor unit - Google Patents

Prevention of leak of impurity in manufacturing semiconductor unit

Info

Publication number
JPS5295975A
JPS5295975A JP1226176A JP1226176A JPS5295975A JP S5295975 A JPS5295975 A JP S5295975A JP 1226176 A JP1226176 A JP 1226176A JP 1226176 A JP1226176 A JP 1226176A JP S5295975 A JPS5295975 A JP S5295975A
Authority
JP
Japan
Prior art keywords
impurity
leak
prevention
manufacturing semiconductor
semiconductor unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1226176A
Other languages
Japanese (ja)
Inventor
Toshiaki Kitahara
Ichiro Takei
Motohiro Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1226176A priority Critical patent/JPS5295975A/en
Publication of JPS5295975A publication Critical patent/JPS5295975A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To prevent leak of impurity in single surface collector diffusion by forming at least two layers of SiO2 film and forming the first layer at a temperature which will not cause diffusion of the impurity.
COPYRIGHT: (C)1977,JPO&Japio
JP1226176A 1976-02-09 1976-02-09 Prevention of leak of impurity in manufacturing semiconductor unit Pending JPS5295975A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1226176A JPS5295975A (en) 1976-02-09 1976-02-09 Prevention of leak of impurity in manufacturing semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1226176A JPS5295975A (en) 1976-02-09 1976-02-09 Prevention of leak of impurity in manufacturing semiconductor unit

Publications (1)

Publication Number Publication Date
JPS5295975A true JPS5295975A (en) 1977-08-12

Family

ID=11800419

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1226176A Pending JPS5295975A (en) 1976-02-09 1976-02-09 Prevention of leak of impurity in manufacturing semiconductor unit

Country Status (1)

Country Link
JP (1) JPS5295975A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60160119A (en) * 1984-01-30 1985-08-21 Rohm Co Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60160119A (en) * 1984-01-30 1985-08-21 Rohm Co Ltd Manufacture of semiconductor device

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