JPS53129982A - Production of mos type semiconductor devices - Google Patents

Production of mos type semiconductor devices

Info

Publication number
JPS53129982A
JPS53129982A JP4531877A JP4531877A JPS53129982A JP S53129982 A JPS53129982 A JP S53129982A JP 4531877 A JP4531877 A JP 4531877A JP 4531877 A JP4531877 A JP 4531877A JP S53129982 A JPS53129982 A JP S53129982A
Authority
JP
Japan
Prior art keywords
production
type semiconductor
semiconductor devices
mos type
avert
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4531877A
Other languages
Japanese (ja)
Inventor
Takashi Osone
Kazuhiko Tsuji
Shiro Horiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4531877A priority Critical patent/JPS53129982A/en
Publication of JPS53129982A publication Critical patent/JPS53129982A/en
Pending legal-status Critical Current

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent the contamination in etching process, avert the production of pinholes and improve the yield of production by covering a gate insulation film with a conductor film thereby forming double layer structure.
COPYRIGHT: (C)1978,JPO&Japio
JP4531877A 1977-04-19 1977-04-19 Production of mos type semiconductor devices Pending JPS53129982A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4531877A JPS53129982A (en) 1977-04-19 1977-04-19 Production of mos type semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4531877A JPS53129982A (en) 1977-04-19 1977-04-19 Production of mos type semiconductor devices

Publications (1)

Publication Number Publication Date
JPS53129982A true JPS53129982A (en) 1978-11-13

Family

ID=12715946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4531877A Pending JPS53129982A (en) 1977-04-19 1977-04-19 Production of mos type semiconductor devices

Country Status (1)

Country Link
JP (1) JPS53129982A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58196019A (en) * 1982-05-11 1983-11-15 Toshiba Corp Preparation of semiconductor device
JPS61194873A (en) * 1985-02-25 1986-08-29 Toshiba Corp Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58196019A (en) * 1982-05-11 1983-11-15 Toshiba Corp Preparation of semiconductor device
JPS61194873A (en) * 1985-02-25 1986-08-29 Toshiba Corp Semiconductor device

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