JPS5331966A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5331966A JPS5331966A JP10647576A JP10647576A JPS5331966A JP S5331966 A JPS5331966 A JP S5331966A JP 10647576 A JP10647576 A JP 10647576A JP 10647576 A JP10647576 A JP 10647576A JP S5331966 A JPS5331966 A JP S5331966A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- oepning
- wirings
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To form Al electrodes of high reliability by oepning holes in the insulation film over a substrate which has undergone formation of required regions, providing Al wirings through a thin copper layer and performing heat treatment.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10647576A JPS5331966A (en) | 1976-09-06 | 1976-09-06 | Production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10647576A JPS5331966A (en) | 1976-09-06 | 1976-09-06 | Production of semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5331966A true JPS5331966A (en) | 1978-03-25 |
Family
ID=14434526
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10647576A Pending JPS5331966A (en) | 1976-09-06 | 1976-09-06 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5331966A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55158665A (en) * | 1979-05-30 | 1980-12-10 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor memory storage |
-
1976
- 1976-09-06 JP JP10647576A patent/JPS5331966A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55158665A (en) * | 1979-05-30 | 1980-12-10 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor memory storage |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5365088A (en) | Semiconductor device | |
| JPS5331964A (en) | Production of semiconductor substrates | |
| JPS53128285A (en) | Semiconductor device and production of the same | |
| JPS52131484A (en) | Semiconductor device | |
| JPS5263680A (en) | Production of semiconductor device | |
| JPS5380986A (en) | Manufacture of semiconductor device | |
| JPS5261960A (en) | Production of semiconductor device | |
| JPS533066A (en) | Electrode formation method | |
| JPS5263672A (en) | Production of semiconductor device | |
| JPS5240061A (en) | Semiconductor device and process for production of same | |
| JPS5227391A (en) | Contact forming method of semiconductor device | |
| JPS5323564A (en) | Bump type semiconductor device | |
| JPS52153373A (en) | Preparation of semiconductor device | |
| JPS5356969A (en) | Production of tape for tape carrier | |
| JPS53130979A (en) | Manufacture for semiconductor device | |
| JPS5272186A (en) | Production of mis type semiconductor device | |
| JPS52141183A (en) | Production of semiconductor devices | |
| JPS539483A (en) | Semiconductor device | |
| JPS53130977A (en) | Manufacture for semiconductor device | |
| JPS5351978A (en) | Manufacture of semiconductor device | |
| JPS5356981A (en) | Production of semiconductor device | |
| JPS5346279A (en) | Production of semiconductor device | |
| JPS53112688A (en) | Manufacture for semiconductor device | |
| JPS52136569A (en) | Beam lead type semiconductor device | |
| JPS52117591A (en) | Semiconductor integrating circuit device |