JPS5348675A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5348675A
JPS5348675A JP12350076A JP12350076A JPS5348675A JP S5348675 A JPS5348675 A JP S5348675A JP 12350076 A JP12350076 A JP 12350076A JP 12350076 A JP12350076 A JP 12350076A JP S5348675 A JPS5348675 A JP S5348675A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
wiring layers
disconnection
converting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12350076A
Other languages
Japanese (ja)
Other versions
JPS5852330B2 (en
Inventor
Ryoji Abe
Yorihiro Uchiyama
Chuichi Takada
Makoto Serigano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP51123500A priority Critical patent/JPS5852330B2/en
Publication of JPS5348675A publication Critical patent/JPS5348675A/en
Publication of JPS5852330B2 publication Critical patent/JPS5852330B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To facilitate the formation of contact windows of wiring layers and prevent the disconnection of Al wiring layers by converting a silicone resin film to a silicon oxide film through radiation of oxygen plasmas.
COPYRIGHT: (C)1978,JPO&Japio
JP51123500A 1976-10-15 1976-10-15 Manufacturing method of semiconductor device Expired JPS5852330B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51123500A JPS5852330B2 (en) 1976-10-15 1976-10-15 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51123500A JPS5852330B2 (en) 1976-10-15 1976-10-15 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5348675A true JPS5348675A (en) 1978-05-02
JPS5852330B2 JPS5852330B2 (en) 1983-11-22

Family

ID=14862147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51123500A Expired JPS5852330B2 (en) 1976-10-15 1976-10-15 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5852330B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6230335A (en) * 1985-07-31 1987-02-09 Fujitsu Ltd Manufacture of semiconductor device
JPH05243577A (en) * 1992-02-26 1993-09-21 Seiko Epson Corp Method of manufacturing thin film transistor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6230335A (en) * 1985-07-31 1987-02-09 Fujitsu Ltd Manufacture of semiconductor device
JPH05243577A (en) * 1992-02-26 1993-09-21 Seiko Epson Corp Method of manufacturing thin film transistor

Also Published As

Publication number Publication date
JPS5852330B2 (en) 1983-11-22

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