JPS5355991A - Manufacture of dielectric separation substrate - Google Patents

Manufacture of dielectric separation substrate

Info

Publication number
JPS5355991A
JPS5355991A JP13106476A JP13106476A JPS5355991A JP S5355991 A JPS5355991 A JP S5355991A JP 13106476 A JP13106476 A JP 13106476A JP 13106476 A JP13106476 A JP 13106476A JP S5355991 A JPS5355991 A JP S5355991A
Authority
JP
Japan
Prior art keywords
manufacture
dielectric separation
separation substrate
single crystal
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13106476A
Other languages
Japanese (ja)
Inventor
Akio Mimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13106476A priority Critical patent/JPS5355991A/en
Publication of JPS5355991A publication Critical patent/JPS5355991A/en
Pending legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: To secure an easing and absorption of the stress which is applied to the single crystal island from an insulator film and and a supporter layer, by providing a buffer film such as non-single crystal semiconductir film between the semiconductor single crystal island and the insulator film of a dielectric separation wafer.
COPYRIGHT: (C)1978,JPO&Japio
JP13106476A 1976-10-30 1976-10-30 Manufacture of dielectric separation substrate Pending JPS5355991A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13106476A JPS5355991A (en) 1976-10-30 1976-10-30 Manufacture of dielectric separation substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13106476A JPS5355991A (en) 1976-10-30 1976-10-30 Manufacture of dielectric separation substrate

Publications (1)

Publication Number Publication Date
JPS5355991A true JPS5355991A (en) 1978-05-20

Family

ID=15049153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13106476A Pending JPS5355991A (en) 1976-10-30 1976-10-30 Manufacture of dielectric separation substrate

Country Status (1)

Country Link
JP (1) JPS5355991A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02295153A (en) * 1989-05-09 1990-12-06 Mitsubishi Electric Corp Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02295153A (en) * 1989-05-09 1990-12-06 Mitsubishi Electric Corp Semiconductor device

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