JPS5359385A - Production method of semiconductor thermal sensitive element - Google Patents

Production method of semiconductor thermal sensitive element

Info

Publication number
JPS5359385A
JPS5359385A JP13489876A JP13489876A JPS5359385A JP S5359385 A JPS5359385 A JP S5359385A JP 13489876 A JP13489876 A JP 13489876A JP 13489876 A JP13489876 A JP 13489876A JP S5359385 A JPS5359385 A JP S5359385A
Authority
JP
Japan
Prior art keywords
sensitive element
thermal sensitive
production method
semiconductor thermal
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13489876A
Other languages
Japanese (ja)
Inventor
Tsutomu Yoshihara
Masahiko Yasuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13489876A priority Critical patent/JPS5359385A/en
Publication of JPS5359385A publication Critical patent/JPS5359385A/en
Pending legal-status Critical Current

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  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

PURPOSE: To easily obtain a thermal sensitive element of a simple substance or to be incorporated in IC, by utilizing the fact that a resistance temperature coefficient is increased if impurity with a density of 1017 to 1019/cm3 is induced i polycrystal Si.
COPYRIGHT: (C)1978,JPO&Japio
JP13489876A 1976-11-09 1976-11-09 Production method of semiconductor thermal sensitive element Pending JPS5359385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13489876A JPS5359385A (en) 1976-11-09 1976-11-09 Production method of semiconductor thermal sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13489876A JPS5359385A (en) 1976-11-09 1976-11-09 Production method of semiconductor thermal sensitive element

Publications (1)

Publication Number Publication Date
JPS5359385A true JPS5359385A (en) 1978-05-29

Family

ID=15139091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13489876A Pending JPS5359385A (en) 1976-11-09 1976-11-09 Production method of semiconductor thermal sensitive element

Country Status (1)

Country Link
JP (1) JPS5359385A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61180112A (en) * 1985-02-04 1986-08-12 Mitsutoyo Mfg Co Ltd Electrode body and its manufacture
JPS61180111A (en) * 1985-02-06 1986-08-12 Mitsutoyo Mfg Co Ltd Digital display type measuring apparatus
JPS62198148A (en) * 1986-02-25 1987-09-01 Sanyo Electric Co Ltd Semiconductor device
JPS62229866A (en) * 1985-11-29 1987-10-08 Nippon Denso Co Ltd Semiconductor device
JPH02311723A (en) * 1989-05-23 1990-12-27 Samsung Electron Co Ltd Semiconductor temperature detection circuit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49105497A (en) * 1973-02-07 1974-10-05
JPS49114382A (en) * 1973-02-28 1974-10-31

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49105497A (en) * 1973-02-07 1974-10-05
JPS49114382A (en) * 1973-02-28 1974-10-31

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61180112A (en) * 1985-02-04 1986-08-12 Mitsutoyo Mfg Co Ltd Electrode body and its manufacture
JPS61180111A (en) * 1985-02-06 1986-08-12 Mitsutoyo Mfg Co Ltd Digital display type measuring apparatus
JPS62229866A (en) * 1985-11-29 1987-10-08 Nippon Denso Co Ltd Semiconductor device
JPS62198148A (en) * 1986-02-25 1987-09-01 Sanyo Electric Co Ltd Semiconductor device
JPH02311723A (en) * 1989-05-23 1990-12-27 Samsung Electron Co Ltd Semiconductor temperature detection circuit

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