JPS5367353A - Manufacturing device of semiconductor crystal - Google Patents

Manufacturing device of semiconductor crystal

Info

Publication number
JPS5367353A
JPS5367353A JP14274176A JP14274176A JPS5367353A JP S5367353 A JPS5367353 A JP S5367353A JP 14274176 A JP14274176 A JP 14274176A JP 14274176 A JP14274176 A JP 14274176A JP S5367353 A JPS5367353 A JP S5367353A
Authority
JP
Japan
Prior art keywords
manufacturing device
semiconductor crystal
uniform
growth
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14274176A
Other languages
Japanese (ja)
Inventor
Jun Ishii
Toshio Tanaka
Ryoichi Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14274176A priority Critical patent/JPS5367353A/en
Publication of JPS5367353A publication Critical patent/JPS5367353A/en
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To enable the growth of the multi-layer wafer with a uniform film thickness from a large-area substrate and to obtain a uniform growth layer with uniform temperature distribution within the substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP14274176A 1976-11-27 1976-11-27 Manufacturing device of semiconductor crystal Pending JPS5367353A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14274176A JPS5367353A (en) 1976-11-27 1976-11-27 Manufacturing device of semiconductor crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14274176A JPS5367353A (en) 1976-11-27 1976-11-27 Manufacturing device of semiconductor crystal

Publications (1)

Publication Number Publication Date
JPS5367353A true JPS5367353A (en) 1978-06-15

Family

ID=15322490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14274176A Pending JPS5367353A (en) 1976-11-27 1976-11-27 Manufacturing device of semiconductor crystal

Country Status (1)

Country Link
JP (1) JPS5367353A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61261291A (en) * 1985-05-16 1986-11-19 Sumitomo Electric Ind Ltd Method of liquid-phase epitaxial growth and device therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61261291A (en) * 1985-05-16 1986-11-19 Sumitomo Electric Ind Ltd Method of liquid-phase epitaxial growth and device therefor

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