JPS5247370A - Diffusion method - Google Patents

Diffusion method

Info

Publication number
JPS5247370A
JPS5247370A JP12358875A JP12358875A JPS5247370A JP S5247370 A JPS5247370 A JP S5247370A JP 12358875 A JP12358875 A JP 12358875A JP 12358875 A JP12358875 A JP 12358875A JP S5247370 A JPS5247370 A JP S5247370A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
diffusion method
doped
impurity
deposit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12358875A
Other languages
Japanese (ja)
Inventor
Yoshiki Tanigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12358875A priority Critical patent/JPS5247370A/en
Publication of JPS5247370A publication Critical patent/JPS5247370A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: to deposit an impurity-doped Ge3N4 film of a softening temperature below 500°C on an Si semiconductor substrate and subject the Si semiconductor substrate to heat treatment at a temperature higher than the softening point thereby obtaining a uniform diffusion layer free from crystal defects.
COPYRIGHT: (C)1977,JPO&Japio
JP12358875A 1975-10-14 1975-10-14 Diffusion method Pending JPS5247370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12358875A JPS5247370A (en) 1975-10-14 1975-10-14 Diffusion method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12358875A JPS5247370A (en) 1975-10-14 1975-10-14 Diffusion method

Publications (1)

Publication Number Publication Date
JPS5247370A true JPS5247370A (en) 1977-04-15

Family

ID=14864296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12358875A Pending JPS5247370A (en) 1975-10-14 1975-10-14 Diffusion method

Country Status (1)

Country Link
JP (1) JPS5247370A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01308900A (en) * 1988-06-06 1989-12-13 Canon Inc Diamond semiconductor manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01308900A (en) * 1988-06-06 1989-12-13 Canon Inc Diamond semiconductor manufacturing method

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