JPS5373972A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5373972A
JPS5373972A JP15048976A JP15048976A JPS5373972A JP S5373972 A JPS5373972 A JP S5373972A JP 15048976 A JP15048976 A JP 15048976A JP 15048976 A JP15048976 A JP 15048976A JP S5373972 A JPS5373972 A JP S5373972A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
concave part
film layer
correctly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15048976A
Other languages
Japanese (ja)
Other versions
JPS5537101B2 (en
Inventor
Atsushi Ueno
Takeya Ezaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15048976A priority Critical patent/JPS5373972A/en
Publication of JPS5373972A publication Critical patent/JPS5373972A/en
Publication of JPS5537101B2 publication Critical patent/JPS5537101B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE: To correctly and easily implant the film layer to the concave part of the substrate, by heating and extending the photo sensitive resin layer in the concave part, after it is provided with a part of the concave part formed on the surface of the film layer surface.
COPYRIGHT: (C)1978,JPO&Japio
JP15048976A 1976-12-14 1976-12-14 Manufacture for semiconductor device Granted JPS5373972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15048976A JPS5373972A (en) 1976-12-14 1976-12-14 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15048976A JPS5373972A (en) 1976-12-14 1976-12-14 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS5373972A true JPS5373972A (en) 1978-06-30
JPS5537101B2 JPS5537101B2 (en) 1980-09-25

Family

ID=15497979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15048976A Granted JPS5373972A (en) 1976-12-14 1976-12-14 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5373972A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58105551A (en) * 1981-11-20 1983-06-23 Fujitsu Ltd Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58105551A (en) * 1981-11-20 1983-06-23 Fujitsu Ltd Semiconductor device

Also Published As

Publication number Publication date
JPS5537101B2 (en) 1980-09-25

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