JPS5263685A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5263685A
JPS5263685A JP50139846A JP13984675A JPS5263685A JP S5263685 A JPS5263685 A JP S5263685A JP 50139846 A JP50139846 A JP 50139846A JP 13984675 A JP13984675 A JP 13984675A JP S5263685 A JPS5263685 A JP S5263685A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
substrate
sensitive resin
photo sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50139846A
Other languages
Japanese (ja)
Inventor
Tadanaka Yoneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50139846A priority Critical patent/JPS5263685A/en
Publication of JPS5263685A publication Critical patent/JPS5263685A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To increase the dielectric strength between drain and substrate by removing the insulating film on a semiconductor substrate with the photo sensitive resin selectively formed thereon as a mask and covering the surroundings of the exposed surface of the exposed substrate with a photo sensitive resin, then diffusing an impurity.
COPYRIGHT: (C)1977,JPO&Japio
JP50139846A 1975-11-20 1975-11-20 Production of semiconductor device Pending JPS5263685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50139846A JPS5263685A (en) 1975-11-20 1975-11-20 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50139846A JPS5263685A (en) 1975-11-20 1975-11-20 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5263685A true JPS5263685A (en) 1977-05-26

Family

ID=15254875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50139846A Pending JPS5263685A (en) 1975-11-20 1975-11-20 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5263685A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59172739A (en) * 1983-03-22 1984-09-29 Toko Inc Semiconductor integrated circuit device and manufacture thereof
JPS61180449A (en) * 1985-02-05 1986-08-13 Toko Inc Dielectric-isolated semiconductor integrated circuit substrate and manufacture thereof
WO2004088375A1 (en) * 2003-03-31 2004-10-14 Hamamatsu Photonics K.K. Silicon substrate and method of forming the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59172739A (en) * 1983-03-22 1984-09-29 Toko Inc Semiconductor integrated circuit device and manufacture thereof
JPS61180449A (en) * 1985-02-05 1986-08-13 Toko Inc Dielectric-isolated semiconductor integrated circuit substrate and manufacture thereof
WO2004088375A1 (en) * 2003-03-31 2004-10-14 Hamamatsu Photonics K.K. Silicon substrate and method of forming the same

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