JPS5374093A - Ion scatter spectroscope - Google Patents

Ion scatter spectroscope

Info

Publication number
JPS5374093A
JPS5374093A JP15004776A JP15004776A JPS5374093A JP S5374093 A JPS5374093 A JP S5374093A JP 15004776 A JP15004776 A JP 15004776A JP 15004776 A JP15004776 A JP 15004776A JP S5374093 A JPS5374093 A JP S5374093A
Authority
JP
Japan
Prior art keywords
spectroscope
scatter
ion
ion scatter
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15004776A
Other languages
Japanese (ja)
Inventor
Masabumi Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP15004776A priority Critical patent/JPS5374093A/en
Publication of JPS5374093A publication Critical patent/JPS5374093A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To improve analysis sensitivity in ion scatter spectrometry by making not only ions but also neutral particles as the object of detection in the scattered components of incident ions to specimen.
JP15004776A 1976-12-13 1976-12-13 Ion scatter spectroscope Pending JPS5374093A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15004776A JPS5374093A (en) 1976-12-13 1976-12-13 Ion scatter spectroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15004776A JPS5374093A (en) 1976-12-13 1976-12-13 Ion scatter spectroscope

Publications (1)

Publication Number Publication Date
JPS5374093A true JPS5374093A (en) 1978-07-01

Family

ID=15488336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15004776A Pending JPS5374093A (en) 1976-12-13 1976-12-13 Ion scatter spectroscope

Country Status (1)

Country Link
JP (1) JPS5374093A (en)

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