JPS5374294A - Production method of thin film resistor - Google Patents

Production method of thin film resistor

Info

Publication number
JPS5374294A
JPS5374294A JP15021776A JP15021776A JPS5374294A JP S5374294 A JPS5374294 A JP S5374294A JP 15021776 A JP15021776 A JP 15021776A JP 15021776 A JP15021776 A JP 15021776A JP S5374294 A JPS5374294 A JP S5374294A
Authority
JP
Japan
Prior art keywords
thin film
production method
film resistor
selected temperature
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15021776A
Other languages
Japanese (ja)
Inventor
Akira Niimi
Yoshiaki Shirato
Masahisa Fukui
Toshitami Hara
Yoshiki Hajimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP15021776A priority Critical patent/JPS5374294A/en
Publication of JPS5374294A publication Critical patent/JPS5374294A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/067—Borides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

PURPOSE:To stabilize resistance by evaporating zirconium boride with electron beam onto substrate of selected temperature then applying thermal processing under selected temperature.
JP15021776A 1976-12-14 1976-12-14 Production method of thin film resistor Pending JPS5374294A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15021776A JPS5374294A (en) 1976-12-14 1976-12-14 Production method of thin film resistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15021776A JPS5374294A (en) 1976-12-14 1976-12-14 Production method of thin film resistor

Publications (1)

Publication Number Publication Date
JPS5374294A true JPS5374294A (en) 1978-07-01

Family

ID=15492086

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15021776A Pending JPS5374294A (en) 1976-12-14 1976-12-14 Production method of thin film resistor

Country Status (1)

Country Link
JP (1) JPS5374294A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05230633A (en) * 1992-02-21 1993-09-07 Nissin Electric Co Ltd Vacuum deposition method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05230633A (en) * 1992-02-21 1993-09-07 Nissin Electric Co Ltd Vacuum deposition method

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