JPS5376558A - Automatic rinsing device - Google Patents

Automatic rinsing device

Info

Publication number
JPS5376558A
JPS5376558A JP15093876A JP15093876A JPS5376558A JP S5376558 A JPS5376558 A JP S5376558A JP 15093876 A JP15093876 A JP 15093876A JP 15093876 A JP15093876 A JP 15093876A JP S5376558 A JPS5376558 A JP S5376558A
Authority
JP
Japan
Prior art keywords
rinsing device
automatic rinsing
tank
article
automatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15093876A
Other languages
Japanese (ja)
Other versions
JPS6018229B2 (en
Inventor
Toshio Tsuboya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15093876A priority Critical patent/JPS6018229B2/en
Publication of JPS5376558A publication Critical patent/JPS5376558A/en
Publication of JPS6018229B2 publication Critical patent/JPS6018229B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Abstract

PURPOSE: To always obtain clean article to be treated by functioning one tank as a rinsing tank for a silicon wafer or the like and underwater storage tank and mechanizing the handling and conveyance of the article to reduce the size of an automatic rinsing device.
COPYRIGHT: (C)1978,JPO&Japio
JP15093876A 1976-12-17 1976-12-17 automatic flushing device Expired JPS6018229B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15093876A JPS6018229B2 (en) 1976-12-17 1976-12-17 automatic flushing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15093876A JPS6018229B2 (en) 1976-12-17 1976-12-17 automatic flushing device

Publications (2)

Publication Number Publication Date
JPS5376558A true JPS5376558A (en) 1978-07-07
JPS6018229B2 JPS6018229B2 (en) 1985-05-09

Family

ID=15507684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15093876A Expired JPS6018229B2 (en) 1976-12-17 1976-12-17 automatic flushing device

Country Status (1)

Country Link
JP (1) JPS6018229B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6159843U (en) * 1984-09-26 1986-04-22
JPS6220131U (en) * 1985-07-23 1987-02-06

Also Published As

Publication number Publication date
JPS6018229B2 (en) 1985-05-09

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