JPS5379A - Manufacture of mos semiconductor device - Google Patents

Manufacture of mos semiconductor device

Info

Publication number
JPS5379A
JPS5379A JP7481776A JP7481776A JPS5379A JP S5379 A JPS5379 A JP S5379A JP 7481776 A JP7481776 A JP 7481776A JP 7481776 A JP7481776 A JP 7481776A JP S5379 A JPS5379 A JP S5379A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
mos semiconductor
resistance
poly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7481776A
Other languages
Japanese (ja)
Inventor
Haruo Nakayama
Yoshihiro Osada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7481776A priority Critical patent/JPS5379A/en
Publication of JPS5379A publication Critical patent/JPS5379A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a self-matching type MOS device which features a high gate voltage-resistance and low diffusion resistance, by laminating poly Si onto the source/drain and resistance layer regions and giving a thermal oxidation to the poly Si.
COPYRIGHT: (C)1978,JPO&Japio
JP7481776A 1976-06-23 1976-06-23 Manufacture of mos semiconductor device Pending JPS5379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7481776A JPS5379A (en) 1976-06-23 1976-06-23 Manufacture of mos semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7481776A JPS5379A (en) 1976-06-23 1976-06-23 Manufacture of mos semiconductor device

Publications (1)

Publication Number Publication Date
JPS5379A true JPS5379A (en) 1978-01-05

Family

ID=13558234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7481776A Pending JPS5379A (en) 1976-06-23 1976-06-23 Manufacture of mos semiconductor device

Country Status (1)

Country Link
JP (1) JPS5379A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6184263B1 (en) 1996-08-29 2001-02-06 Xerox Corporation Blends containing photosensitive high performance aromatic ether curable polymers
US6203143B1 (en) 1996-08-29 2001-03-20 Xerox Corporation Hydroxyalkylated high performance curable polymers
US6323301B1 (en) 1996-08-29 2001-11-27 Xerox Corporation High performance UV and heat crosslinked or chain extended polymers

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6184263B1 (en) 1996-08-29 2001-02-06 Xerox Corporation Blends containing photosensitive high performance aromatic ether curable polymers
US6203143B1 (en) 1996-08-29 2001-03-20 Xerox Corporation Hydroxyalkylated high performance curable polymers
US6323301B1 (en) 1996-08-29 2001-11-27 Xerox Corporation High performance UV and heat crosslinked or chain extended polymers

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