JPS538074A - Mis type semiconductor device - Google Patents

Mis type semiconductor device

Info

Publication number
JPS538074A
JPS538074A JP8198976A JP8198976A JPS538074A JP S538074 A JPS538074 A JP S538074A JP 8198976 A JP8198976 A JP 8198976A JP 8198976 A JP8198976 A JP 8198976A JP S538074 A JPS538074 A JP S538074A
Authority
JP
Japan
Prior art keywords
mis type
semiconductor device
type semiconductor
mis
souce
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8198976A
Other languages
Japanese (ja)
Inventor
Yukio Tanigaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8198976A priority Critical patent/JPS538074A/en
Publication of JPS538074A publication Critical patent/JPS538074A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To produce a MIS type device of a high density of integration by forming souce and drain regions on the inner side faces of the grooves provided in a substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP8198976A 1976-07-12 1976-07-12 Mis type semiconductor device Pending JPS538074A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8198976A JPS538074A (en) 1976-07-12 1976-07-12 Mis type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8198976A JPS538074A (en) 1976-07-12 1976-07-12 Mis type semiconductor device

Publications (1)

Publication Number Publication Date
JPS538074A true JPS538074A (en) 1978-01-25

Family

ID=13761873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8198976A Pending JPS538074A (en) 1976-07-12 1976-07-12 Mis type semiconductor device

Country Status (1)

Country Link
JP (1) JPS538074A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60196936A (en) * 1984-03-21 1985-10-05 Seiko Epson Corp Manufacture of semiconductor device
JPS63213970A (en) * 1987-03-03 1988-09-06 Nec Corp Nonvolatile semiconductor memory cell
JPS63269565A (en) * 1987-04-27 1988-11-07 Nec Corp semiconductor storage device
JPH02312A (en) * 1989-02-13 1990-01-05 Seiko Epson Corp Manufacture of semiconductor device
JP2004312019A (en) * 2003-04-07 2004-11-04 Silicon Storage Technology Inc Nonvolatile floating gate memory cell having floating gate formed in depression, array and manufacturing method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60196936A (en) * 1984-03-21 1985-10-05 Seiko Epson Corp Manufacture of semiconductor device
JPS63213970A (en) * 1987-03-03 1988-09-06 Nec Corp Nonvolatile semiconductor memory cell
JPS63269565A (en) * 1987-04-27 1988-11-07 Nec Corp semiconductor storage device
JPH02312A (en) * 1989-02-13 1990-01-05 Seiko Epson Corp Manufacture of semiconductor device
JP2004312019A (en) * 2003-04-07 2004-11-04 Silicon Storage Technology Inc Nonvolatile floating gate memory cell having floating gate formed in depression, array and manufacturing method thereof

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