JPS5381090A - Production fo semiconductor device - Google Patents
Production fo semiconductor deviceInfo
- Publication number
- JPS5381090A JPS5381090A JP15652476A JP15652476A JPS5381090A JP S5381090 A JPS5381090 A JP S5381090A JP 15652476 A JP15652476 A JP 15652476A JP 15652476 A JP15652476 A JP 15652476A JP S5381090 A JPS5381090 A JP S5381090A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- forming
- isolation
- shorten
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- 238000002955 isolation Methods 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 230000007547 defect Effects 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To shorten impurity diffusion time and eliminate crystal defects at junction parts by beforehand forming recesses in isolation layer forming regions and forming isolation layers at the same time simultaneously with the formation of a base layer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15652476A JPS5381090A (en) | 1976-12-27 | 1976-12-27 | Production fo semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15652476A JPS5381090A (en) | 1976-12-27 | 1976-12-27 | Production fo semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5381090A true JPS5381090A (en) | 1978-07-18 |
Family
ID=15629663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15652476A Pending JPS5381090A (en) | 1976-12-27 | 1976-12-27 | Production fo semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5381090A (en) |
-
1976
- 1976-12-27 JP JP15652476A patent/JPS5381090A/en active Pending
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