JPS5383485A - Diffusion type semiconductor pressure transducer - Google Patents

Diffusion type semiconductor pressure transducer

Info

Publication number
JPS5383485A
JPS5383485A JP15904076A JP15904076A JPS5383485A JP S5383485 A JPS5383485 A JP S5383485A JP 15904076 A JP15904076 A JP 15904076A JP 15904076 A JP15904076 A JP 15904076A JP S5383485 A JPS5383485 A JP S5383485A
Authority
JP
Japan
Prior art keywords
pressure
type semiconductor
pressure transducer
semiconductor pressure
diffusion type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15904076A
Other languages
Japanese (ja)
Inventor
Takeshi Yasuhara
Masaru Okubo
Tomoyoshi Kamoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP15904076A priority Critical patent/JPS5383485A/en
Publication of JPS5383485A publication Critical patent/JPS5383485A/en
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To prevent leakage of atmospheric pressure to a reference pressure chamber and compensate errors of outputs owing to temperature changes by forming a pressure sensitive chamber on the diffused surface side of a pressure sensitive diaphragm and the reference pressure chamber on the opposite surface thereof, and holding the inside at the pressure approximately equal to the atmospheric pressure.
COPYRIGHT: (C)1978,JPO&Japio
JP15904076A 1976-12-28 1976-12-28 Diffusion type semiconductor pressure transducer Pending JPS5383485A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15904076A JPS5383485A (en) 1976-12-28 1976-12-28 Diffusion type semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15904076A JPS5383485A (en) 1976-12-28 1976-12-28 Diffusion type semiconductor pressure transducer

Publications (1)

Publication Number Publication Date
JPS5383485A true JPS5383485A (en) 1978-07-22

Family

ID=15684915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15904076A Pending JPS5383485A (en) 1976-12-28 1976-12-28 Diffusion type semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS5383485A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56158931A (en) * 1980-05-13 1981-12-08 Fuji Electric Co Ltd Pressure transducer
JPS57187632A (en) * 1981-05-14 1982-11-18 Toshiba Corp Semiconductor pressure conversion device
JPS59112593U (en) * 1983-01-20 1984-07-30 オリオン機械株式会社 Vacuum generator with vacuum pressure detection function of suction part

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56158931A (en) * 1980-05-13 1981-12-08 Fuji Electric Co Ltd Pressure transducer
JPS57187632A (en) * 1981-05-14 1982-11-18 Toshiba Corp Semiconductor pressure conversion device
JPS59112593U (en) * 1983-01-20 1984-07-30 オリオン機械株式会社 Vacuum generator with vacuum pressure detection function of suction part

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