JPS5411027A - Copper alloy chemical polishing solution - Google Patents

Copper alloy chemical polishing solution

Info

Publication number: JPS5411027A
Authority: JP; Japan
Prior art keywords: copper alloy; chemical polishing; alloy chemical; polishing solution; soln
Prior art date: 1977-06-27
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP7681177A

Other languages

English (en)

Inventor

Kazuhisa Yasuda

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Seiko Instruments Inc

Original Assignee

Seiko Instruments Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-06-27

Filing date

1977-06-27

Publication date

1979-01-26

1977-06-27 Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc

1977-06-27 Priority to JP7681177A priority Critical patent/JPS5411027A/ja

1979-01-26 Publication of JPS5411027A publication Critical patent/JPS5411027A/ja

Status Pending legal-status Critical Current

Links

229910000881 Cu alloy Inorganic materials 0.000 title abstract 2
238000005498 polishing Methods 0.000 title abstract 2
239000000126 substance Substances 0.000 title abstract 2
MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 abstract 2
QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract 2
GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract 1
229910017604 nitric acid Inorganic materials 0.000 abstract 1
230000033116 oxidation-reduction process Effects 0.000 abstract 1
238000004448 titration Methods 0.000 abstract 1

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
- C23F3/04—Heavy metals
- C23F3/06—Heavy metals with acidic solutions

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
General Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
ing And Chemical Polishing (AREA)
Mechanical Treatment Of Semiconductor (AREA)

JP7681177A 1977-06-27 1977-06-27 Copper alloy chemical polishing solution Pending JPS5411027A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP7681177A JPS5411027A (en)	1977-06-27	1977-06-27	Copper alloy chemical polishing solution

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP7681177A JPS5411027A (en)	1977-06-27	1977-06-27	Copper alloy chemical polishing solution

Publications (1)

Publication Number	Publication Date
JPS5411027A true JPS5411027A (en)	1979-01-26

Family

ID=13616043

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP7681177A Pending JPS5411027A (en)	1977-06-27	1977-06-27	Copper alloy chemical polishing solution

Country Status (1)

Country	Link
JP (1)	JPS5411027A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0259533A1 (en) *	1986-09-11	1988-03-16	Eka Nobel Aktiebolag	Method of reducing the emission of nitrogen oxides from a liquid containing nitric acid

1977
- 1977-06-27 JP JP7681177A patent/JPS5411027A/ja active Pending

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0259533A1 (en) *	1986-09-11	1988-03-16	Eka Nobel Aktiebolag	Method of reducing the emission of nitrogen oxides from a liquid containing nitric acid
US4938838A (en) *	1986-09-11	1990-07-03	Eka Nobel Ab	Method of reducing the emission of NOx gas from a liquid containing nitric acid

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