JPS5411027A - Copper alloy chemical polishing solution - Google Patents
Copper alloy chemical polishing solutionInfo
- Publication number
- JPS5411027A JPS5411027A JP7681177A JP7681177A JPS5411027A JP S5411027 A JPS5411027 A JP S5411027A JP 7681177 A JP7681177 A JP 7681177A JP 7681177 A JP7681177 A JP 7681177A JP S5411027 A JPS5411027 A JP S5411027A
- Authority
- JP
- Japan
- Prior art keywords
- copper alloy
- chemical polishing
- alloy chemical
- polishing solution
- soln
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000881 Cu alloy Inorganic materials 0.000 title abstract 2
- 238000005498 polishing Methods 0.000 title abstract 2
- 239000000126 substance Substances 0.000 title abstract 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 abstract 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract 1
- 229910017604 nitric acid Inorganic materials 0.000 abstract 1
- 230000033116 oxidation-reduction process Effects 0.000 abstract 1
- 238000004448 titration Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
- C23F3/04—Heavy metals
- C23F3/06—Heavy metals with acidic solutions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
PURPOSE:To provide a copper alloy chemical polishing soln. obtd. by adding an oxidation-reduction indicator to a mixed soln. of hydrogen peroxide and sulfuric acid or nitric acid, the concn. of which can be controlled easily without requiring titration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7681177A JPS5411027A (en) | 1977-06-27 | 1977-06-27 | Copper alloy chemical polishing solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7681177A JPS5411027A (en) | 1977-06-27 | 1977-06-27 | Copper alloy chemical polishing solution |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5411027A true JPS5411027A (en) | 1979-01-26 |
Family
ID=13616043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7681177A Pending JPS5411027A (en) | 1977-06-27 | 1977-06-27 | Copper alloy chemical polishing solution |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5411027A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0259533A1 (en) * | 1986-09-11 | 1988-03-16 | Eka Nobel Aktiebolag | Method of reducing the emission of nitrogen oxides from a liquid containing nitric acid |
-
1977
- 1977-06-27 JP JP7681177A patent/JPS5411027A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0259533A1 (en) * | 1986-09-11 | 1988-03-16 | Eka Nobel Aktiebolag | Method of reducing the emission of nitrogen oxides from a liquid containing nitric acid |
| US4938838A (en) * | 1986-09-11 | 1990-07-03 | Eka Nobel Ab | Method of reducing the emission of NOx gas from a liquid containing nitric acid |
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